Abstract:Zirconia (ZrO 2 ) thin films were deposited on silicon using a zirconium cathodic arc plasma source in the presence of oxygen following by thermal treatment at various temperatures. The structure and phase composition of the zirconia films were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The bone bioactivity of the as-deposited and heat-treated ZrO 2 films was evaluated by soaking them in simulated body fluids (SBF) for different time durations. The tetragonal phase predominates in the ZrO 2 film and its surface microstructures strongly depend on the processing conditions such as substrate temperature during deposition, sample bias, and annealing temperature. The particle size which increases with higher annealing temperature is smaller than 100 nm in spite of annealing at 1000C for 2 hours. Bone-like apatite was found to form on the surface of the as-deposited ZrO 2 film in our SBF immersion experiments, suggesting that the surface is bioactive. However, the bioactivity of the film deteriorated after thermal treatment suggesting that the bioactivity of the ZrO 2 films depends on the particle size in the near surface. The nano-structured surface is believed to be the key factor to induce apatite precipitation on the ZrO 2 film surface.

Infrared And Raman Spectroscopic Studies Of Optically Transparent Zirconia (Zro2) Films Deposited By Plasma-Assisted Reactive Pulsed Laser Deposition

Structural, interfacial and optical characterization of ultrathin zirconia film grown by in situ thermal oxidation of sputtered metallic Zr films

Structure and properties of zirconia (ZrO<sub>2</sub>) films fabricated by plasma-assisted cathodic arc deposition

Interfacial and microstructural properties of zirconium oxide thin films prepared directly on silicon

Synthesis and Characterization of HfO2 and ZrO2 Thin Films Deposited by Plasma Assisted Reactive Pulsed Laser Deposition at Low Temperature

FT-IR, Structure and Dielectric Property Investigation of Strontium Zirconate Thin Films Prepared by MOD Technique

Mechanical Properties Of Zirconia Thin Films Deposited By Filtered Cathodic Vacuum Arc

The Thermal Stability of Zirconium Aluminate High-K Film on Strained SiGe Layer

High-Quality ZrO2 Thin Films Deposited on Silicon by High Vacuum Electron Beam Evaporation

Microstructure and Optical Properties of Ultra-Thin Zirconia Films Prepared by Nitrogen-Assisted Reactive Magnetron Sputtering

Deposition Of High K Zro2 Thin Films By High Vacuum Electron Beam Evaporation At Room Temperature

Deposition of ZrNxOy films by filtered cathodic vacuum arc

Deposition of high k ZrO/sub 2/ thin films by high vacuum electron beam evaporation at room temperature

INTERFACIAL MICROSTRUCTURE OF HIGH-κ DIELECTRIC CaZrOx FILMS DEPOSITED BY PULSE LASER DEPOSITION IN LOW OXYGEN PRESSURE

Phase Transformation of Nanosized Zro2 Upon Thermal Annealing and Intense Radiation

X-ray Diffraction and Electrical Characterization of Photo-Cvd Zirconium Oxide Layers

Biomedical Zirconia Films Synthesized by Cathodic Arc Plasma Deposition

Structure and dielectric properties of Zr-Al-O thin films prepared by pulsed laser deposition

Synthesis and characterization of zirconium oxynitride coatings deposited by filtered cathodic vacuum arc technology

Microstructural Characterization of Zirconia Films Produced by the Dual Ion Beam Deposition Technique