Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

Investigation of Microfabrication of Diamond-Like Film Via Focused Ion Beam Milling

Investigation of Diffractive Optical Element Fabricated on Diamond Film by Use of Focused Ion Beam Direct Milling

Optical Study of Low Energy Ion-Beam-Assisted Deposited Diamond-Like Carbon Films

Diamond-like Carbon Film Synthesized by Ion Beam Assisted Deposition and Its Tribological Properties

Studies of Diamond-Like Carbon Films Prepared by Ion Beam-Assisted Deposition

Mechanical and tribological properties of non-hydrogenated DLC films synthesized by IBAD

Studies of diamond-like carbon films coated on PMMA by ion beam assisted deposition

Effect of Ion Bombardment Energy on the Properties of Diamond-like Carbon Film

Field Emission Properties of Diamondlike Carbon Films Deposited by Ion Beam Assisted Deposition

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Synthesized by Plasma Immersion Ion Implantation-Deposition

Femtosecond-laser processing incubation in Diamond-like carbon

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

A Study on Focused Ion Beam (FIB) Milling Machining and Fabrication Technology of Nano-Scale Diamond Tool for Machining Fine-Patterns in a Free-Form Surfaces

Influence of Ne+ Bombarding Energy on the Properties of Diamond-Like Carbon Film by Ion Beam Assisted Deposition

Ion Beam Assisted Deposition of Diamond-Like Carbon Onto Steel Materials: Preparation and Advantages

Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

Ion Energy Tuning for Enhanced sp3 Carbon Fraction in Electron Cyclotron Resonance Ion Beam Deposited Diamond-Like Carbon Coatings: a Computational and Experimental Approach

Investigation of physical properties of quartz after focused ion beam bombardment

Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology