Abstract:Ultra-short pulse laser interaction with diamond materials has attracted extensive interest in micro- and nano-machining, especially for the fabrication of micro tools, because of the straightforward method and high precision. Thanks to the development of chemical vapor deposition (CVD) technology, high-quality CVD diamonds are employed in more varieties of tools as performance-enhancing coatings. The purpose of the experiments reported here was to explore the machinability of CVD diamond coating under the irradiation of femtosecond (fs) pulsed laser. The factor-control approach was adopted to investigate the influence of scanning speed, single pulse energy and repetition rate on the surface quality and carbon phase transition of CVD diamond coating. The material removal rate and surface roughness were evaluated. The interaction mechanism of scanning speed, single pulse energy, and repetition rate were discussed, and the fs laser ablation threshold of CVD diamond coating was calculated. It was demonstrated that two ablation mechanisms (weak and intensive) were in existence as evidenced by the distinct surface morphologies induced under different processing conditions. A strong dependence on the variation of scanning speed and pulse energy is identified in the examination of surface roughness and removal rate. Lorentzian–Gaussian deconvolution of Raman spectra illustrates that fs laser irradiation yields a strong modification effect on the coating and release the compressive stress in it. Furthermore, a newly defined parameter referring to the fs laser energies applied to unit volume was introduced to depict the degree of ablation and the Taguchi method was used to figure out the significance of different parameters. The ablation threshold of CVD diamond coating at the effective pulses of 90 is calculated to be 0.138 J/cm2.

Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Diamond-like Carbon Films Deposited by Femtosecond Laser Pulses

Diamond-like carbon thin films deposited by kHz femtosecond pulsed laser

Effect of characteristics of plasma plume on the diamond-like film deposition

Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition

Deposition of Diamond-Like Carbon Film by Ultrashort Pulsed Excimer Laser

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Femtosecond-laser processing incubation in Diamond-like carbon

Growth and properties of hydrogen-free DLC films deposited by surface-wave-sustained plasma

A Study of Hard Diamond-Like Carbon Films in Mid-Frequency Dual-Magnetron Sputtering

Deposition of diamond-like carbon films by barrier discharge plasma with 1.4 and 20 kHz power sources

Pulsed Laser Scanning Deposition of Diamondlike Thin Films

Deposition of Diamond-like Carbon films using Dense Plasma Focus

Investigation on Diamond-like Carbon Films Prepared by RF Magnetron Reactive Sputtering

CVD of hard DLC films in a radio frequency inductively coupled plasma source

Structure and Tribology Properties of Diamond-Like Carbon Films Prepared by Microwave Electron Cyclotron Resonance Plasma Source Ion Implantation

Structural Analysis of Arc Deposited Diamond-Like Carbon Films by Raman and X-Ray Photoelectron Spectroscopy

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating