Abstract:In this work, diamond-like carbon (DLC) films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition (PEUMS-PVD) and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition (MW-ECRPECVD) techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy (AFM). With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio I(D)/I(G) increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and the sp(3)-bond carbon density reducing, resulted in the peak values of hardness (H) and elastic modulus (E). Silicon addition promoted the formation of sp(3) bonding and reduced the hardness. The incorporated Si atoms substituted Sp(2)- bond carbon atoms in ring structures, which promoted the formation of sp(3)-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power.

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Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Investigation on Cr-doped Diamond-Like Carbon Films Prepared by Mid-Frequency Dual-Magnetron Sputtering

Investigation of Diamond-Like-Carbon Films Prepared by Unbalanced Magnetron Sputtering

A Study of Hard Diamond-Like Carbon Films in Mid-Frequency Dual-Magnetron Sputtering

Electron structure and optical property of diamond-like carbon

Investigation on the Preparation of High Quality Amorphous Diamond Films

Study on Preparation,structures and Anticoagulation Properties of Diamond-Like Carbon Films

Preparation and Characterization of High Quality Diamond Like Carbon Films on Si Microspheres

Characterisation of Diamond-like Carbon Films Prepared by Electrochemical Deposition

Studies of Diamond-Like Carbon (DLC) Films Deposited on Stainless Steel Substrate with Si/SiC Intermediate Layers

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Preparation and Characterization of DLC Films by Microwave ECR Plasma Source Enhanced Unbalance Magnetron Sputtering

Study on Influence of Target Powers on Properties of Diamond-Like Carbon Films Deposited by Mid-Frequency Magnetron Sputtering System

Electrochemical Behaviour of Sputtering Deposited DLC Films

Growth Feature of Diamond-Like Carbon Films by Various Vacuum Plasma Methods

Structures and Optical Properties of DLC films Deposited by Pulsed Laser Deposition

Evaluation of Diamond-Like Carbon Films Electrodeposited on an Al Substrate from the Liquid Phase with Pulse-Modulated Power

Thick Diamond-like Carbon Film Deposited Using Mid-frequency Magnetron Sputtering

Structure and Optical Characteristics of DLC Films

Electrodeposition Of Diamond-Like Amorphous Carbon Films On Si From N,N-Dimethylformamide