Abstract:In this work, diamond-like carbon (DLC) films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition (PEUMS-PVD) and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition (MW-ECRPECVD) techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy (AFM). With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio I(D)/I(G) increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and the sp(3)-bond carbon density reducing, resulted in the peak values of hardness (H) and elastic modulus (E). Silicon addition promoted the formation of sp(3) bonding and reduced the hardness. The incorporated Si atoms substituted Sp(2)- bond carbon atoms in ring structures, which promoted the formation of sp(3)-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power.

Investigation on the Preparation of High Quality Amorphous Diamond Films

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Characterisation of Diamond-like Carbon Films Prepared by Electrochemical Deposition

High-Power-Density Plasma Deposition of Diamond-Like Carbons Films

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Diamond-like Carbon Film on 20 CrNiMo Steel Prepared by Hollow-Cathode Glow Discharge

Preparation and Characterization of High Quality Diamond Like Carbon Films on Si Microspheres

Investigation on Cr-doped Diamond-Like Carbon Films Prepared by Mid-Frequency Dual-Magnetron Sputtering

Investigation on Diamond-like Carbon Films Prepared by RF Magnetron Reactive Sputtering

Diamond-like Carbon (DLC) Films Deposited on Copper Substrate Through Preparation of Intermediate Layers

Evaluation of Diamond-Like Carbon Films Electrodeposited on an Al Substrate from the Liquid Phase with Pulse-Modulated Power

Optical Study of Low Energy Ion-Beam-Assisted Deposited Diamond-Like Carbon Films

Electrodeposition Of Diamond-Like Amorphous Carbon Films On Si From N,N-Dimethylformamide

Preparation of diamond-like carbon films by high-intensity pulsed-ion-beam deposition at room temperature

Study on Preparation,structures and Anticoagulation Properties of Diamond-Like Carbon Films

Studies of Diamond-Like Carbon (DLC) Films Deposited on Stainless Steel Substrate with Si/SiC Intermediate Layers

Preparation and Thermal Characterization of Diamond-Like Carbon Films

Structure and Properties of Diamond-Like Carbon Films Prepared by High-Intensity Pulsed-Ion-beam Ablation Deposition

Structures and Optical Properties of DLC films Deposited by Pulsed Laser Deposition

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique