Abstract:Diamond-like carbon (DLC) films have been deposited on Si(100) substrates by an ion beam assisted deposition (IBAD) system. The effect of ion bombardment energy on surface roughness, mechanical and tribological properties of the DLC films has been studied over the ion bombardment energy range of 100-800 eV. The measured results of atomic force microscopy (AFM) showed that the DLC films are very smooth and the surface roughness is lower than that of the Si substrate at certain ion bombardment energy. Elasticity and nanohardness of the DLC films were studied by a nanoindentation technique. From nanoindentation load-displacement curves, it was concluded that most of the DLC films have high elasticity. Comparing the nanohardness with the conventional knoop microhardness of the same series of samples, we saw that the values of knoop microhardness are much higher than those of nanohardness. The correlation of the sp(3) bond fraction in the films estimated from Raman spectroscopy with surface roughness, elasticity and hardness has been established. Tribological behavior of the DLC films sliding against the ZrO2 ball was evaluated using a pin-on-disk tribometer. It was found that the surface roughness and the hardness have an effect on the friction coefficients. (C) 2000 Published by Elsevier Science S.A. All rights reserved.

Optical Study of Low Energy Ion-Beam-Assisted Deposited Diamond-Like Carbon Films

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Electron structure and optical property of diamond-like carbon

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Influence of Ne+ Bombarding Energy on the Properties of Diamond-Like Carbon Film by Ion Beam Assisted Deposition

Characterisation of Diamond-like Carbon Films Prepared by Electrochemical Deposition

Mechanical and tribological properties of non-hydrogenated DLC films synthesized by IBAD

Simulations of the Structure Characteristic of Diamond-Like Carbon Films Formed by Ion-Beam-assisted Deposition

Preparation and Thermal Characterization of Diamond-Like Carbon Films

Spectroscopic Ellipsometry Characterization of Diamond-Like Carbon Films Formed by Filtered Arc Deposition

Investigation on the Preparation of High Quality Amorphous Diamond Films

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Structures and Optical Properties of DLC films Deposited by Pulsed Laser Deposition

Diamond-like carbon thin films deposited by kHz femtosecond pulsed laser

Field Emission Properties of Diamondlike Carbon Films Deposited by Ion Beam Assisted Deposition

Optical emission spectroscopy during diamond-like carbon films deposition process by ICPECVD

Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation

Structural Analysis of Arc Deposited Diamond-Like Carbon Films by Raman and X-Ray Photoelectron Spectroscopy

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Diamond-like Carbon (DLC) Films Deposited on Copper Substrate Through Preparation of Intermediate Layers

Preparation of diamond-like carbon films by high-intensity pulsed-ion-beam deposition at room temperature