Abstract:Diamond-like carbon (DLC) films have been deposited by a magnetically enhanced plasma (MEP) chemical vapor deposition (CVD) system. The properties and structures of DLC films deposited by MEP-CVD using various gases (methane, He/methane, Ne/methane, and Ar/methane) were studied. The mechanical properties in terms of hardness, Young’s modulus and stress, and optical properties in terms of optical band gap and refractive index were enhanced by adding inert gas in methane plasma. The magnitude of the effects on the properties for various inert gases was found as Ne, Ar, and He, on the surface roughness was found as Ar, Ne, and He. The Raman characteristic shows a dependence of the bias voltage and inert-gas/methane ratio, as well as the inert gases dilution. The Raman spectroscopy analysis indicates that the changes of properties of the DLC films are due to the structural changes, such as sp2 and sp3 content in the films prepared under various deposition conditions. The films deposited in Ne/methane show the lowest disordered (D) peak to graphitic (G) peak intensity ratio, the D and G peak positions; highest stress, hardness, Young’s modulus, optical band gap, and lowest reflective index. The films deposited in Ar/methane show the lowest surface roughness. This was proposed due to the optimum balance in the inert gas ionization potential and atomic mass.

Electron structure and optical property of diamond-like carbon

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Optical Study of Low Energy Ion-Beam-Assisted Deposited Diamond-Like Carbon Films

Structural Characterization And Properties Enhancement Of Diamond-Like Carbon-Films Synthesized Under Low-Energy Ne+ Bombardment

Electrochemical Characterization of Diamond Like Carbon Thin Films

Comparative Analysis of Dlc Flim Fine Structure by Raman Spectra and X-Ray Photoelectron Spectroscopy

Optical Quantum-Size Effects in Diamond-Like Carbon Superlattice Structures

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

A Study of Hard Diamond-Like Carbon Films in Mid-Frequency Dual-Magnetron Sputtering

Structural Analysis of Arc Deposited Diamond-Like Carbon Films by Raman and X-Ray Photoelectron Spectroscopy

Surface morphology of diamond-like carbon films prepared by liquid deposition

Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition

Structural Characters and Tribological Properties of Diamondlike Carbon Films

Field Emission Properties of Diamondlike Carbon Films Deposited by Ion Beam Assisted Deposition

Properties and structures of diamond-like carbon film deposited using He, Ne, Ar/methane mixture by plasma enhanced chemical vapor deposition

Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films

Optical and Electrical Properties of Diamond-like-Carbon Coatings Prepared by Electron Cyclotron Resonance Ion Beam Deposition Process

Spectroscopic Ellipsometry Characterization of Diamond-Like Carbon Films Formed by Filtered Arc Deposition

Investigation on Cr-doped Diamond-Like Carbon Films Prepared by Mid-Frequency Dual-Magnetron Sputtering

Micro-structure of Diamond-Like Carbon Films Prepared by Liquid Electrodeposition

Structure and mechanical properties of diamondlike carbon films produced by hollow-cathode plasma deposition