Abstract:A microfabrication process for piano-convex microlens arrays with continuous relief for refractive and diffractive usage by focused ion beam (FIB) technology is introduced in detail. Two FIB techniques--milling and deposition of SiO2--are used for the fabrication. A 9x9 array of micro diffractive optical elements (DOEs) with a singlet f number of 2 and a numerical aperture (NA) of 0.25, and a 9x9 refractive microlens array with a singlet diameter of 60 mum, NA of 0.1, and f number of 5 were designed and fabricated by the milling method. In addition, the method of FIB-induced SiO2 deposition for microlenses is utilized. The lens profile and focusing characteristics were measured with a WYKO NT2000 interferometer and a BeamScope-5PTM beam scanner, respectively. The focused spot size is about 6.7 mum (full width at half maximum) and 5.1 mum (at 1/e(2)) for the diffractive lens and the refractive lens array, respectively. The rms thickness errors within a diameter of 27 mum for the DOEs and within 60 mum for the refractive lenses (produced by milling) are 11 nm, and 15 nm, respectively. The wave aberrations are 1.7 and 1.5 waves, respectively. (C) 2001 Society of Photo-Optical instrumentation Engineers.

Investigation of Diffractive Optical Element Fabricated on Diamond Film by Use of Focused Ion Beam Direct Milling

Investigation of Microfabrication of Diamond-Like Film Via Focused Ion Beam Milling

Reactive ion beam etching for diffractive optical elements

Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

Investigation of Diffractive Optical Element with Continuous Relief and Submicron Feature Size for Fiber Coupling

Investigation of Single Mode Fiber Coupling Using Diffractive Optical Element with Continuous Relief Fabricated by Focused Ion Beam Technology

Theory and Method of Microstructure Doe As Substitution for Aspheric Surface

Microfabrication Of Diffractive Optical Element With Continuous Relief By Focused Ion Beam

Improving Diffraction Efficiency of DOE in Wide Waveband Application by Multilayer Micro-Structure

Structural and optical characterizations of nanostructured diamond films grown on Si(001) substrates

Investigation of Diffractive-Refractive Microlens Array Fabricated by Focused Ion Beam Technology

Quasi-Direct Writing Of Diffractive Structures With A Focused Ion Beam

A Study on Focused Ion Beam (FIB) Milling Machining and Fabrication Technology of Nano-Scale Diamond Tool for Machining Fine-Patterns in a Free-Form Surfaces

Transfer of continuous-relief diffractive structures into diamond by use of inductively coupled plasma dry etching.

Direct-write milling of diamond by a focused oxygen ion beam

Integration of Micro-Optical Elements with Top-End of Fibers Via Focused Ion Beam Direct Fabrication

One-step Nanofabrication of Diffractive Structure via Focused Ion Beam Scanning on Glass

Sub-Diffraction Limited Nanogroove Fabrication of 30 Nm Features on Diamond Films Using 800 Nm Femtosecond Laser Irradiation

Investigation of Integrated Diffractive/Refractive Microlens Microfabricated by Focused Ion Beam

Design and Quantitative Analysis of Diffractive Optical Element to Realize True Beam Smoothing on an Inclined Plane

Microfabrication of Microlens Array by Focused Ion Beam Technology