Improving Diffraction Efficiency of DOE in Wide Waveband Application by Multilayer Micro-Structure

MA Tao,SHEN Yi-bing,YANG Guo-guang
DOI: https://doi.org/10.3969/j.issn.1007-2276.2008.01.027
2008-01-01
Abstract:According to the disadvantage of single layer diffractive optical element(DOE),a new DOE is introduced.More than two layers of stratified microstructures of different phase heights and dispersive materials are taken into the configuration to increase variable factors of the phase distribution function of multilayer DOE.By controlling the phase modulation of wide waveband to approximate to integer times of 2π,the diffraction efficiency of a double-layer DOE can be greater than 96% in 0.4~0.8 μm visual band.As substitute for fluorite lens,a double-layer DOE is used in a long focal-length apochromatic objective lens.The modulation transfer function(MTF) of this hybrid optical system is suggested for evaluating diffraction efficiency of the multilayer DOE.The results show the diffraction efficiency has a wide and symmetrical distribution in the whole waveband.
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