Ion Beam Assisted Deposition of Diamond-Like Carbon Onto Steel Materials: Preparation and Advantages

XM He,WZ Li,HD Li

DOI: https://doi.org/10.1016/s0257-8972(95)02818-8

IF: 4.865

1996-01-01

Surface and Coatings Technology

Abstract:Ion beam assisted deposition (IBAD) was used to prepare diamond-like carbon (DLC) film on steel materials at nearly room temperature. The films were synthesized by Ar+ beam sputtering of a chromium interlayer on the steel and concurrent bombardment by a mixture of Ne+-CHn+ with an energy of 300 eV. Owing to energetic Ar+ dynamic mixing at an early stage of chromium and carbon deposition, atomic intermixed layers at the DLC-Cr-steel interface and chromium carbide at the DLC-Cr interface were formed. Tribological experiments demonstrated that DLC films with the special interfacial structure undewent even wear under high Hertzian stresses of 2.55–3.22 GPa with low friction coefficients of 0.025–0.036. Low energy ion bombardment and gradient interfacial designs promise enhanced tribological performance of DLC films deposited onto steel substrates using IBAD. This may present a useful method for the deposition of DLC coatings onto steel devices for surface modification at room temperature.