Abstract:Silicon nitride (Si3N4) waveguides become an appealing choice to realize complex photonic integrated circuits for applications in telecom/datacom transceivers, sensing, and quantum information sciences. However, compared to high-index-contrast silicon-on-insulator platform, the index difference between the Si3N4 waveguide core and its claddings is more moderate, which adversely affects the development of vertical grating-coupled optical interfaces. Si3N4 grating couplers suffer from the reduced strength, therefore it is more challenging to radiate all the waveguide power out of the grating within a beam size that is comparable to the mode field diameter of standard optical fibers. In this work, we present, by design and experiments, a library of low-loss and fabrication-tolerant surface grating couplers, operating at 1.55 μm wavelength range and standard SMF-28 fiber. Our designs are fabricated on 400 nm Si3N4 platform using single-etch fabrication and foundry-compatible low-pressure chemical vapor deposition wafers. Experimentally, the peak coupling loss of - 4.4 dB and - 3.9 dB are measured for uniform couplers, while apodized grating couplers yield fiber-chip coupling loss of - 2.9 dB, without the use of bottom mirrors, additional overlays, and multi-layered grating arrangements. Beside the single-hero demonstrations, over 130 grating couplers were realized and tested, showing an excellent agreement with finite difference time domain designs and fabrication-robust performance. Demonstrated grating couplers are promising for Si3N4 photonic chip prototyping by using standard optical fibers, leveraging low-cost and foundry-compatible fabrication technologies, essential for stable and reproducible large-volume device development.

Low-loss Silicon Slot Waveguides and Couplers Fabricated with Optical Lithography and Atomic Layer Deposition.

Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

Ultra-low loss waveguide platform in silicon photonics

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Experimental Demonstration of Silicon Slot Waveguide with Low Transmission Loss at 1064Nm

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Ultracompact low-loss coupler between strip and slot waveguides.

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods

Bent silicon slot waveguides with both low loss and low nonlinearity

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

Low-loss mode converter for coupling light into slotted photonic crystal waveguide

Low Transmission Loss Silicon Slot Waveguide Operating at 1064Nm

Low loss hollow-core waveguide on a silicon substrate

Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection