Abstract:Silicon photonics is the most promising technology for applications ranging from large-bandwidth, low power consumption datacom transceivers, to wearable health monitoring devices, or optical data-bus for quantum processors. To bring silicon PIC based products to the market, ultra-low loss waveguides would be preferred. In the conventional submicron silicon platforms, higher propagation loss (in the order of ~1 dB/cm) induced by the roughness of the etched sidewalls, as well as higher fiber-to-waveguide coupling loss due to its sub-micron dimensions impose challenges for its deployment in many products. VTT’s thick-SOI technology offers a promising alternative, owing to its lower propagation loss (~0.1 dB/cm), reduced polarization sensitivity, and capacity to handle higher optical power without exciting nonlinear losses. Its micron-scale cross-section enables efficient edge coupling. Exploiting its ultra-low loss, we have demonstrated unprecedented level of integration such as, a 40-channel array waveguide grating (AWG) based mux/de-mux, or a Faraday rotator based on silicon spirals, without employing any magneto-optic material. Now we reduced the propagation loss further, down to record-low 4 dB/m, by controlled annealing of waveguides in 100% pure H2 environment. In our optimized, MPW-compatible annealing process, the atomic mobility of Si smoothens the scallops from etching, without causing any structural deformation of the waveguides. This substantially reduced loss enabled us to develop ultra-high Q ring resonators on our thick-SOI platform, as well as sidewall smoothening for the active components, thereby making our platform a bedrock for the emerging applications such as, quantum computing, biosensors, and 3D imaging.

Experimental Demonstration of Silicon Slot Waveguide with Low Transmission Loss at 1064Nm

Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm

Low Transmission Loss Silicon Slot Waveguide Operating at 1064Nm

Silicon Slot Waveguide with Low Transmission and Bending Loss at ~ 1 Μm

Designing Low Transmission Loss Silicon Slot Waveguide at Wavelength Band of High Material Absorption

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Coupling structure for silicon slot waveguide operating at 1064 nm

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

Tunable Silicon Slot Micro-Ring Operating at 1000Nm

Wafer-Scale Demonstration of Low-Loss (~0.43 dB/cm), High-Bandwidth (> 38 GHz), Silicon Photonics Platform Operating at the C-Band

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Optimal Design of a Silicon-on-insulator Nanowire Waveguide for Broadband Wavelength Conversion

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

Ultra-low loss waveguide platform in silicon photonics

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Electro-Optic Silicon Modulator With Horizontal Photonic Crystal Slot Slab

Dispersion Engineering of a Silicon-Nanocrystal-based Slot Waveguide for Broadband Wavelength Conversion

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon