An Efficient Test Structure for Interface Trap Characterization under BTI Stresses

Yandong He,Ganggang Zhang,Lin Han,Xing Zhang
DOI: https://doi.org/10.1109/icsict.2014.7021291
2014-01-01
Abstract:An efficient test structure for interface trap density characterization has been proposed. Based on this single structure and one-time IV measurement, the interface trap densities on both n- and p-type Si/SiO2 interfaces are obtained, achieving 1x efficiency improvement and 50% cost reduction. BTI-stress-induced degradation was studied and compared under the same structure, demonstrating a better test efficiency and resolution to interface traps generation at different Si/SiO2 interfaces.
What problem does this paper attempt to address?