Design and Implementation of an On-Chip Polymer Micro Ball Bearing

Chih-Chun Lee,Yu-Che Huang,Wen-Hsiung Hsiao,Weileun Fang
DOI: https://doi.org/10.1109/nems.2013.6559719
2013-01-01
Abstract:This study presents a novel design and fabrication process to realize an on-chip micro ball bearing. The ball bearing consists of a polymer-Si-polymer outer-race (stator), and a suspended polymer-Si-polymer inner-disk (rotor) supported by polymer micro-balls. The outer-race and inner-disk are demolded from silicon mold, which is patterned by wet isotropic etching on double-polished 525 μm-thick silicon wafer. The liquid phase photocurable polymer balls are dispensed by commercial dispenser with a hundred micrometer diameter tip and in-situ self-assembled in buffer liquid. After photocurable polymer solidified by UV-curing, the polymer balls are confined between the outer race and inner disk. Note the ball bearing is fabricated on a single wafer with no assembly required.
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