Nanostructures for all-polymer microfluidic systems

Maria Matschuk,Henrik Bruus,Niels B. Larsen
DOI: https://doi.org/10.1016/j.mee.2009.11.167
IF: 2.3
2010-05-01
Microelectronic Engineering
Abstract:We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially. Arrays of holes of 50nm diameter/35nm depth and 100nm/100nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.
engineering, electrical & electronic,nanoscience & nanotechnology,optics,physics, applied
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