Nanoimprint Lithography and Surface Modification As Prospective Technologies for Heterogeneous Integration

N. Kehagias,W. Hu,V. Reboud,N. Lu,B. Dong,L. Chi,H. Fuchs,A. Genua,J. A. Alduncin,J. A. Pomposo,D. Mecerreyes,C. M. Sotomayor Torres
DOI: https://doi.org/10.1002/pssc.200780226
2008-01-01
Abstract:Nanoimprint lithography offers the possibility to pattern wafer-scale surfaces with nm-sized structures in polymers reaching the 10 nm lateral size. Printable polymers can be tailored to have a surface upon which molecules self-assemble. Furthermore, the resulting surfaces may be heterogeneously structured with or without etching away parts of imprinted polymers, in order to provide a flexible platform for structured surfaces with functional materials. We review progress in these combined approaches and discuss three examples: (a) a process to modify printed surfaces in order to grow polymer brushes, (b) a technique to realise patterned surfaces with different emission colours by using a one-step gas phase deposition of a single type of molecules on pre-patterened solid substrates and (c) a general method suitable to pattern different conducting polymer species at the nanoscale range by combining nanoimprint lithography process ad a lift-off process.
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