A Cmos-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing

Yi Zhang,Shuyu Yang,Andy Eu-Jin Lim,Guo-Qiang Lo,Christophe Galland,Tom Baehr-Jones,Michael Hochberg
DOI: https://doi.org/10.1109/lpt.2013.2241049
IF: 2.6
2013-01-01
IEEE Photonics Technology Letters
Abstract:We demonstrated a waveguide crossing for submicron silicon waveguides with average insertion loss of 0.18±0.03 dB and crosstalk of -41±2 dB, uniform across an 8-inch wafer. The device was fabricated in a CMOS-compatible process using 248 nm lithography, with only one patterning step.
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