Abstract:Abstract MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies set the boundary conditions for inductor design and their electrical and mechanical performance. This review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication, presents recent advances in 3D additive fabrication technologies, and discusses the challenges and opportunities of MEMS inductors for two emerging applications, namely, integrated power electronics and neurotechnologies. Among the four top-down MEMS fabrication approaches, 3D surface micromachining and through-substrate-via (TSV) fabrication technology have been intensively studied to fabricate 3D inductors such as solenoid and toroid in-substrate TSV inductors. While 3D inductors are preferred for their high-quality factor, high power density, and low parasitic capacitance, in-substrate TSV inductors offer an additional unique advantage for 3D system integration and efficient thermal dissipation. These features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power converters. From another perspective, 3D bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS technologies. Finally, we discuss inspiring and emerging research opportunities for MEMS inductors.

SU-8 enhanced high power density MEMS inductors

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

Asic Design of an Integrable Simulated Inductor with Huge Inductance

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

A Scalable Model of On-chip Inductor Including Tunable Dummy Metal Density Factor

On-chip Vertical Tapered Solenoid Inductor with High Self-Resonance Frequency

High-Performance 3-D Silicon-Embedded Coupled Solenoid Inductors With Inserted Magnetic Core

High-Density Planar Integrated Magnetics with Two-Sided Merged Inductor Windings and Integrated Cores for Resonant DC/DC Converter

Small-Resistance And High-Quality-Factor Magnetic Integrated Inductors On Pcb

The design and fabrication of LTCC chip inductors for high frequency applications based on barium ferrites

MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

Design and Simulation of Si-Based MEMS Inductor

On-chip soft-ferrite-integrated inductors for RF IC

Optimization Methods for High Inductance-Density Inductors for High Speed Integrated Circuits

Simulation and Optimization of High Performance On-Chip Solenoid MEMS Inductor

On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC

MEMS-based Fabrication of High-Performance Inductors with Back Hollow Structure and Ferromagnetic Film

Novel MEMS-based Fabrication Technology of Micro Solenoid-Type Inductor

Ferrite-integrated On-Chip RF Solenoid Inductor

Modeling and Design of Integrated Inductor and Transformer Considering Superposed Flux Density in On-Board-Charger

The simulation study of high-performance micro-inductors Based on MEMS 3D coils