Abstract:Abstract MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies set the boundary conditions for inductor design and their electrical and mechanical performance. This review provides a comprehensive overview of state-of-the-art MEMS technologies for inductor fabrication, presents recent advances in 3D additive fabrication technologies, and discusses the challenges and opportunities of MEMS inductors for two emerging applications, namely, integrated power electronics and neurotechnologies. Among the four top-down MEMS fabrication approaches, 3D surface micromachining and through-substrate-via (TSV) fabrication technology have been intensively studied to fabricate 3D inductors such as solenoid and toroid in-substrate TSV inductors. While 3D inductors are preferred for their high-quality factor, high power density, and low parasitic capacitance, in-substrate TSV inductors offer an additional unique advantage for 3D system integration and efficient thermal dissipation. These features make in-substrate TSV inductors promising to achieve the ultimate goal of monolithically integrated power converters. From another perspective, 3D bottom-up additive techniques such as ice lithography have great potential for fabricating inductors with geometries and specifications that are very challenging to achieve with established MEMS technologies. Finally, we discuss inspiring and emerging research opportunities for MEMS inductors.

MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

On the Efficacy of Through-Silicon-Via Inductors

System-level Design Consideration and Optimization of Through-Silicon-via Inductor.

Novel MEMS-based Fabrication Technology of Micro Solenoid-Type Inductor

TSV inductor optimization and its design implication

The simulation study of high-performance micro-inductors Based on MEMS 3D coils

3D MEMS In-Chip Solenoid Inductor with High Inductance Density for Power MEMS Device

Silicon molding techniques for integrated power MEMS inductors

Design and Simulation of Si-Based MEMS Inductor

MEMS-based Fabrication of High-Performance Inductors with Back Hollow Structure and Ferromagnetic Film

3-D Microinductor Fabricated by Using MEMS Technology

Wafer-level Fabrication of High-Power-density MEMS Passives Based on Silicon Molding Technique

SU-8 enhanced high power density MEMS inductors

Soft magnetic materials for power inductors: State of art and future development

Design, Simulation, and Characterization of Variable Inductor with Electrostatic Actuation Fabricated by Using Surface Micromachining Technology

Simulation and Optimization of High Performance On-Chip Solenoid MEMS Inductor

The design and fabrication of LTCC chip inductors for high frequency applications based on barium ferrites

Micro-transformer on MEMS Silicon-based

A Solenoid-Type Inductor Fabricated by MEMS Technique

Fabricate High Performance RF-MEMS Inductor with a Smart Nano Magnetic Granular Film According to Function Purpose

High-Performance 3-D Silicon-Embedded Coupled Solenoid Inductors With Inserted Magnetic Core