Millimeter Wave Phase Shifters With Periodically Spaced Mems Bridges Loaded

Fm Guo,Zs Lai,Gl Wu,Sz Zhu,Zq Zhu,Gq Yang,Xc Ge,Sq Chen,Jf Xie
DOI: https://doi.org/10.1109/ICSICT.2001.982008
2001-01-01
Abstract:A basic structure of MEMS millimeter-wave phase shifters is presented in this paper, which consists of a coplanar wave-guide (CPW) transmission line periodically loaded with 8similar to32 MEMS metal bridges. The switching element consists of a thin metallic membrane, which has two states, actuated or unactuated, depending on the applied bias. The phase shifters in the Micro-Electromechanical System (MEMS) techniques were measured by using the Cascade 12000 Microwave Probe and Hp-8722D Vector Network Analyzer in the frequency range of 1-10 and 30-40 GHz. The measured results demonstrate that the phase shifter with 8 bridges loaded has phase shifted 30similar to68degrees and 1.095dB insertion loss at 2.395 GHz.
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