Design of 600 GHz 3-bit delay-line phase shifter using RF NEMS series switches

Yi Yang,King Yuk Chan,Ramer, R.
DOI: https://doi.org/10.1109/APS.2011.5997237
2011-01-01
Abstract:This paper presents for the first time a study on a 3-bit coplanar waveguide (CPW) NEMS phase shifter simulated and optimized at 600 GHz. Simulation results based on the Ansoft High Frequency Structure Simulator (HFSS) predict a return loss better than 19.5 dB for all bit combinations in the frequency band of 550 GHz to 650 GHz. A maximum phase error less of than 3.91 % is simulated. The dimension of the device is 59.3 μm × 37.8 μm. This is the first smallest 600 GHz RF NEMS phase shifter design up-to-date.
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