A Ka-band 0/Π MEMS Phase Shifter

Shi Yi
2012-01-01
Abstract:A true-time-delay Ka-band 0/Π MEMS phase shifter is reported,which is based on switched-line design and composed of 4 dc-contact series MEMS switches.The stepped impedance coplanar waveguide(CPW) lines serve to mitigating the mismatch caused by the bend connecters and air-bridge structures.The phase shifter is fabricated on a 400 μm thickness high resistivity silicon wafer using low temperature metal-dielectric surface micromachining process,the chip size is 1.4 mm×2.8 mm.Experimental data show a maximum phase error of 3.2°,an insertion loss of 2 dB and a return loss of better than-15 dB from 34 GHz to 36 GHz.
What problem does this paper attempt to address?