Notice of Violation of IEEE Publication PrinciplesKa-band Distributed MEMS Phase Shifters on Silicon Using AlSi Suspended Membrane

J Qing,YL Shi,W Li,ZS Lai,ZQ Zhu,PS Xin
DOI: https://doi.org/10.1109/jmems.2004.828734
IF: 2.829
2004-01-01
Journal of Microelectromechanical Systems
Abstract:This paper presents the design, fabrication, and testing of distributed MEMS phase shifters for Ka-band communication systems. The phase shift can be obtained by changing MEMS bridge capacitors located periodically over the transmission line. Simulation results of phase shifters with various structural parameters are analyzed to develop the optimized designs. The phase shifters are fabricated on the high-resistivity silicon substrate, using suspended AlSi bridge membrane. The measured results demonstrate a phase shift of 286degrees at 36 GHz; with the actuation voltage of 25 V, and a return loss better than 10 dB over 0-40 GHz band. In addition, lifetimes of 3 x 10(6) cycles have been achieved for the fabricated phase shifter with all MEMS bridges held to be valid. It shows that AlSi alloy has a nice compromise between strength and resilience.
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