A Ka-band 0/∏ MEMS phase shifter

Yuanwei Yu,Jian Zhu,Lili Jiang,Yi Shi
2012-01-01
Abstract:A true-time-delay Ka-band 0/∏ MEMS phase shifter is reported, which is based on switched-line design and composed of 4 dc-contact series MEMS switches. The stepped impedance coplanar waveguide (CPW) lines serve to mitigating the mismatch caused by the bend connecters and air-bridge structures. The phase shifter is fabricated on a 400 μm thickness high resistivity silicon wafer using low temperature metal-dielectric surface micromachining process, the chip size is 1.4 mm×2.8 mm. Experimental data show a maximum phase error of 3.2°, an insertion loss of 2 dB and a return loss of better than -15 dB from 34 GHz to 36 GHz.
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