MEMS phase shifter based on capacitance-inductance phase shift units

Liu Zewen,Li Ling
2012-01-01
Abstract:A miniature 3-bit switched-line microelectromechanical systems(MEMS) phase shifter was developed based on capacitance-inductance phase shift units to reduce the size of traditional switched-line phase shifters.A micromachined overlap capacitor-inductor structure replaces the traditional transmission line.The 90° phase shift unit is one fourth the size of the traditional 90° transmission line(t-line) while the 45° phase shift unit is half the size of the a traditional 45° t-line.The design was simulated and optimized using Ansoft high frequency structure simulator(HFSS) software.For the 45° phase shift unit,the simulations show that the return loss is better than-27.25 dB and the insertion loss is better than-0.33 dB from 20 GHz to 40 GHz.For the 90° phase shift unit,the return loss is better than-26.25 dB and the insertion loss is better than-0.51 dB.The 3-bit phase shifter provides full 360° phase control at intervals of 45° at 35 GHz.The average insertion loss and the return loss are-2.63 dB and-15 dB and the average phase error is 3.67°.The designed MEMS phase shifter is suitable for miniature phased array radars operating at 35 GHz.
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