Abstract:Robustness performance is one of the most important concerns in the design of ESD (Electro-Static Discharge) protection devices, and this quality plays a more and more important role in NEMS protection devices. Improvement of robustness requires not only experience but also TCAD (Technology Computer Aided Design) methodology to evaluate ESD protection devices in NEMS. A novel TCAD methodology for robustness evaluation is presented and developed here. This methodology is based on mix-mode transient circuit simulation, and this simulation method depicts ESD events better. Through analyse of the time effect on power accumulation, an important key parameter, named as robustness coefficient, is provided to characterize and evaluate robustness performance of ESD protection devices quantificationally. Based on analyse of this robustness coefficient of different ESD devices under different ESD models and levels, the results show that this TCAD methodology has a good ability of convergence, and can be used to evaluate robustness performance of ESD protection devices objectively.

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