Study of DC Sputtered Cu2O Growth and P-Cu2o/ N-Igzo Heterojunctions

Ji-Yu Feng,Chun-Feng Hu,Xin-Ping Qu

DOI: https://doi.org/10.1109/icsict.2014.7021183

2014-01-01

Abstract:Cu2O thin films were deposited on glass substrates by DC magnetron sputtering. The effects of the ratio of Ar/O2 and sputtering pressure on the structure of the formed copper oxide films were investigated. It is found that with increase of O2 ratio and sputtering pressure, the formed films change from a mixture of Cu and Cu2O to pure CuO film. It is also found that the film has a preferred Cu2O (200) orientation and cluster surface morphology. The fabricated p-Cu2O/n-IGZO heterojunction has a rectifying I-V characteristic and exhibits a response to UV illumination.