High-Gain AlGaN Solar-Blind Avalanche Photodiodes

z g shao,dun jun chen,hai lu,rong zhang,da peng cao,w j luo,y d zheng,liang li,zhong hui li
DOI: https://doi.org/10.1109/LED.2013.2296658
2014-01-01
Abstract:This letter reports high performance AlGaN solar-blind avalanche photodiodes (APDs) with separate absorption and multiplication structure grown by metal-organic chemical vapor deposition on AlN templates. In fabricating APD devices, we applied a photo-electrochemical treatment process after mesa etching to reduce damage induced by etching. After introducing this process, the leakage current of the fabricated devices was reduced obviously and a record-high gain of 1.2×104 at the reverse bias of 84 V was achieved under the measurement condition with the protection current constrained to 10-5 A.
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