Back-Illuminated Separate Absorption And Multiplication Algan Solar-Blind Avalanche Photodiodes

Youran Huang,Dunjun Chen,Huanjun Lu,KeXiu Dong,Rong Zhang,Youdou Zheng,Liben Li,Zhonghui Li
DOI: https://doi.org/10.1063/1.4772984
IF: 4
2012-01-01
Applied Physics Letters
Abstract:This letter reports the fabrication and performance of back-illuminated separate absorption and multiplication AlGaN solar-blind avalanche photodiodes. Devices with a 60-mu m-diameter active area and a double-mesa structure exhibit a low dark current density of 1.06 x 10(-8) A/cm(2) at the reverse bias of 20 V and a maximum multiplication gain up to 3000 at the reverse bias of 91 V. The temperature dependence of avalanche voltage shows a large positive temperature coefficient of 0.05 V/K, confirming that avalanche multiplication is the dominant gain mechanism in the photodiodes. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4772984]
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