Investigation on morphology and thermal stability of NiGe utilizing ammonium fluoride pretreatment for germanium-based technology

Yue Guo,Xia An,Runsheng Wang,Xing Zhang,Ru Huang
DOI: https://doi.org/10.1109/LED.2011.2107496
IF: 4.8157
2011-01-01
IEEE Electron Device Letters
Abstract:In this letter, a novel ammonium fluoride pretreatment (AFP) method has been proposed to improve the morphology and thermal stability of NiGe on bulk germanium devices. The root mean square roughness of NiGe film has been obviously decreased using the AFP method, indicating more smooth and flat NiGe surfaces formed compared with samples by hydrochloric acid and hydrofluoric acid pretreatments. Als...
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