Abstract:The chip-fiber grating coupler is a fundamental building block in integrated photonics, providing convenient on-wafer testing and packaging. Couplers based on a silicon nitride (SiNx) material platform can achieve wider bandwidths than silicon-based couplers, but suffer from lower efficiency due to the relative low material refractive index. The efficiency of the SiNx grating coupler can be improved by using high-reflectivity silicon grating reflectors underneath. However, such a silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this Letter, we demonstrate an easy-to-fabricate SiNx-on-SOI transverse-electric mode grating coupler requiring only one patterning step (grating alone), and without the need for HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm has been experimentally measured.

Total Internal Reflection Type Echelle Grating Demultiplexer Based on Amorphous Silicon Nanowire Platform

Etched Diffraction Grating Demultiplexers Based on Amorphous Silicon Nanowire Platform

Cross-Order Echelle Grating Triplexer Based on Amorphous Silicon Nanowire Platform

Experimental Demonstration of a Cross-Order Echelle Grating Triplexer Based on an Amorphous Silicon Nanowire Platform.

An Eight-Channel 400 GHz-Spacing Etched Diffraction Grating Multi/Demultiplexer on a Nanophotonic Silicon-on-Insulator Platform

Third Order Silicon (si) Nitride Side-Walled Grating Using Silicon-on- Insulatir (SOI)

Design of a Polarization-Insensitive Echelle Grating Demultiplexer Based on Silicon Nanophotonic Wires

Echelle Diffraction Grating Based High-Resolution Spectrometer-on-chip on SiON Waveguide Platform

Etched-Diffraction-Grating-Based Planar Waveguide Demultiplexer on Silicon-on-Insulator

Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Silicon-on-Insulator-Based Compact Optical Demultiplexer Employing Etched Diffraction Grating

Compact Arrayed Waveguide Grating Demultiplexers Based on Amorphous Silicon Nanowires

Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Using a retro-reflecting echelle grating to improve WDM demux efficiency

Experimental Demonstration of an Ultracompact Si-nanowire-based Reflective Arrayed-Waveguide Grating (de)multiplexer with Photonic Crystal Reflectors.

Integrable Echelle Grating (de)multiplexer for 100GBASE-LR4

InP Based Echelle Diffraction Grating Multiplexer with Flat-Passband

Silicon-On-Insulator Based Miniature Integrated Spectrometer Using Echelle Diffraction Grating

Monolithic Integrated Wavelength Demultiplexer Based on a Waveguide Rowland Circle Grating in InGaAsP/lnP

Silicon-on-insulator-based Optical Demultiplexer Employing Turning-Mirror-integrated Arrayed-Waveguide Grating

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.