Silicon-On-Insulator Based Miniature Integrated Spectrometer Using Echelle Diffraction Grating

Li Qin,Lei Wang,Ming-Yu Li,Jian-Jun He

2011-01-01

Abstract:The design of an on-chip spectrometer based on a silicon-on-insulator planar echelle diffraction grating (EDG) is presented. It has 129 channels, 0.25 nm channel spacing, and 0.1 nm FWHM bandwidth. The spectral range is 1534 nm~1566 nm. The size of the chip is about 0.7 cm×1 cm.

What problem does this paper attempt to address?

Echelle Diffraction Grating Based High-Resolution Spectrometer-on-chip on SiON Waveguide Platform

Xiao Ma,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.3788/col201311.032501

IF: 2.56

2013-01-01

Chinese Optics Letters

Abstract:We demonstrate a spectrometer-on-a-chip based on echelle diffraction grating (EDG) in silicon oxynitride (SiON) waveguides for operation in 850nm wavelength range. The chip comprises 120 output waveguides with 0.25 nm spacing and has a size of only 11mm×6mm. The measured adjacent channel crosstalk is close to 30 dB, the 3dB channel bandwidth is ≪ 0.1 nm and the channel non-uniformity is 3dB for wavelength from 838nm to 852nm.
Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array

Xiao Ma,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1109/jphot.2013.2250944

IF: 2.4

2013-01-01

IEEE Photonics Journal

Abstract:We demonstrate an integrated spectrometer-on-a-chip composed of an echelle diffraction grating (EDG) and metal-semiconductor-metal (MSM) waveguide photodetector array based on silicon-on-insulator (SOI). In the passive section, silicon oxynitride (SiON) is chosen as the material for the waveguide core and is deposited after selectively removing the top silicon layer of the SOI wafer. The buried silicon dioxide layer of the SOI wafer functions as the lower cladding for the SiON core waveguide. In the active section, the MSM photodetector array is fabricated on the top silicon layer of the SOI waveguide with a pitch width of 7.5 mu m. With the butt-coupling structure, a responsivity of 0.41 A/W is obtained at 850 nm. Based on the CMOS-compatible fabrication process, we have fabricated a 60-channel spectrometer with a chip size of 9 mm x 6 mm operating around 850 nm. The measured channel spacing is 0.494 nm, with an adjacent channel crosstalk around 18 dB. The channel nonuniformity is less than 1.5 dB. The CMOS-compatible spectrometer with integrated silicon photodetector array can provide a low-cost solution for high-resolution on-chip spectral analysis for visible and near-infrared light with the wavelength below 1100 nm.
An Echelle Diffraction Grating for Imaging Spectrometer

Minyue Yang,Han Wang,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1117/12.2236666

2016-01-01

Abstract:We demonstrate an echelle diffraction grating (EDG) of 17 input waveguides and 33 output waveguides. For each input waveguide, only 17 of 33 output waveguides are used, receiving light ranging from 1520 nm to 1600 nm wavelength. The channel spacing of the EDG is 5 nm, with loss of -6dB and crosstalk of -17dB for center input waveguide and -15dB for edge input waveguides. Based on the 3 mu m SOI platform the device is polarization insensitive. As a simple version of EDG spectrometer it is designed to be a part of the on-chip spectroscopic system of the push-broom scanning imaging spectrometer. The whole on-chip spectrometer consists of an optical on-off switch array, a multi-input EDG and detector array. With the help of on-off switch array the multiple input waveguides of the EDG spectrometer could work in a time division multiplexed fashion. Since the switch can scan very fast (less than 10 microseconds), the imaging spectrometer can be operated in push-broom mode. Due to the CMOS compatibility, the 17_channel EDG scales 2.5x3 mm(2). The full version of EDG spectrometer is designed to have 129 input waveguides and 257 output waveguides (129 output channel for each input waveguide), working in wavelength ranging from 1250 nm to 1750 nm, and had similar blazed facet size with the 17_channel one, which means similar fabrication tolerance in grating facets. The waveguide EDG based imaging spectrometer can provide a low-cost solution for remote sensing on unmanned aerial vehicles, with advantages of small size, light weight, vibration-proof, and high scalability.
Imaging Spectrometers Based on Waveguide Echelle Diffraction Gratings

Minyue Yang,Han Wang,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1109/piers.2016.7734723

2016-01-01

Abstract:A method to integrate the spectroscopic system of the push-broom scanning imaging spectrometer onto a single chip is proposed using echelle diffraction grating to split the light in the near infrared range according to different wavelengths. The on-chip spectrometer consists of an optical on-off switch array, a multi-input echelle diffraction grating (EDG) and a detector array. The designed EDG has a channel spacing of about 4nm and up to 129 channels corresponding to wavelengths from 1.25 μm to 1.75 μm with channel uniformity less than 2 dB. Based on the 3 μm SOI platform the device is polarization insensitive. The switch array is integrated on the single mode ridge input waveguides, allowing the 129 input waveguides to be selected one-by-one in a time division multiplexed fashion. Since the switch can be scanned very fast (less than 10 microseconds), the imaging spectrometer can be operated in push-broom mode. Due to the CMOS compatibility, the waveguide EDG based imaging spectrometer can provide a low-cost solution for remote sensing on unmanned aerial vehicles, with advantages of small size, light weight vibration-proof, and high scalability.
Design of Compact Wide-Band Triple Grating Imaging Spectrometer Based on Freeform Surfaces

Jianjun Chen,Linlin Wang,Limin Huo,Cuifang Kuang,Lei Mao,Mingyue Tan,Mingwei Shao,Lu Yin

DOI: https://doi.org/10.1364/ao.527853

IF: 1.9

2024-01-01

Applied Optics

Abstract:Wide -band, high spectral resolution, and miniaturized imaging spectrometers have important applications. However, the working band, spectral resolution, and volume of the imaging spectrometers are mutually restricted. To solve this problem, we proposed a method in which multiple working bands share the same optical components except gratings, and the working bands switch with the switching of the working gratings. Based on the freeform surfaces characterized by XY polynomials, we designed a compact wide -band triple grating imaging spectrometer through the design ideas of human -computer interaction and iterative optimization. The imaging spectrometer works in the wavelength band of 200 nm ti 1600 nm, covering ultraviolet (UV), visible, and near -infrared light, and it has a compact optical path volume of 24 mm x 38 mm x 80 mm. Three gratings with 0.0025 mm, 0.005 mm, and 0.01 mm line spacing are used to realize dispersion with high diffraction efficiency in the bands of 200 nm ti 400 nm, 400 nm ti 800 nm, and 800 nm ti 1600 nm, respectively. The UV detector receives imaging light in the UV band (200 nm ti 400 nm), and the visible near -infrared (VNIR) detector receives imaging light in the visible and near -infrared bands (400 nm ti 1600 nm). The design results show that the spectral resolutions of the three bands are 0.4 nm, 0.8 nm, and 1.6 nm, and the spectral smile and keystone distortion are less than 1.4 mu m. The design results have engineering application value. (c) 2024 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.
Polarization Insensitive Arrayed-Input Spectrometer Chip Based on Silicon-on-insulator Echelle Grating

Minyue Yang,Mingyu Li,Jianjun He

DOI: https://doi.org/10.3788/col201715.081301

IF: 2.56

2017-01-01

Chinese Optics Letters

Abstract:We demonstrate a polarization insensitive arrayed-input spectrometer using echelle diffraction grating (EDG) for hyperspectral imaging. The EDG consists of 65 input waveguides and 129 output waveguides, allowing spectral measurements of 65 image pixels at a time when used in combination with a micro-electromechanical system micro mirror array. The spectral resolution reaches 7.8 nm for wavelengths ranging from 1250 to 1700 nm. The measured loss is -2dB, and the crosstalk is lower than -20dB. The 3 mu m silicon-on-insulator platform provides the device with polarization insensitive characteristics. The chip size is only 6mm x 10 mm.
A Compact Integrated Spectrometer Based on SU-8 Polymer Using Echelle Diffraction Grating

Xiang Xia,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/acpc.2013.af2b.7

2013-01-01

Abstract:A compact echelle diffraction grating spectrometer based on SU-8 polymer waveguides is designed and simulated. This EDG spectrometer has a size of only 6mm × 11mm, and can be fabricated by using photolithography process without additional etching process. The spectral resolution is 0.25 nm.
High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array

Keqi Ma,Kaixuan Chen,Ning Zhu,Liu Liu,Sailing He

DOI: https://doi.org/10.1109/JPHOT.2018.2888592

IF: 2.4

2019-01-01

IEEE Photonics Journal

Abstract:We design a 121-channel on-chip spectrometer based on an echelle grating with densely packed waveguide array on 220-nm silicon-on-insulator platform. It offers a high spectral resolution of 0.5 nm in a 3 · 3 mm2 footprint, covering a spectral range of 60 nm near the central wavelength of 1550 nm. We fabricate the spectrometer with 20 channels for verification of the design, which is limited by our...
A Polarization-Insensitive High-Resolution Micro-Spectrometer Using (N + 3) × (N + 3) Arrayed Waveguide Grating on SOI Platform

Jun Zou,Lingfeng Li,Yuan Zhuang,Changhui Wang,Ming Zhang,Zichun Le,Xuyang Wang,Gaozhe Cai,Shilun Feng,Jian-Jun He

DOI: https://doi.org/10.1109/jlt.2022.3209233

IF: 4.7

2022-01-01

Journal of Lightwave Technology

Abstract:Ultra-compact on-chip spectrometers with high resolution and large bandwidth play a crucial role in miniaturized spectroscopic analysis systems. Here we present a novel polarization-insensitive micro-spectrometer with high resolution and large bandwidth based on a ( N + 3) × ( N + 3) arrayed waveguide grating (AWG) on silicon-on-insulator (SOI) platform. The proposed AWG can be viewed as two same 3 × N AWGs with each one having three input waveguides with channel spacing of 4/3 Δ λ and N output waveguides with channel spacing of Δ λ . The three input waveguides are time division multiplexed, i.e., they are excited one by one in sequence. As a result, combining all spectral responses of each input, a micro-spectrometer with channel wavelength spacing enhanced to one-third Δ λ and channel number enlarged to 3 × ( N – 2) is achieved, only using N output channels. The polarization diversity scheme is utilized to address the polarization sensitive issue of silicon nano-waveguide, i.e., the AWG operates at a counter-propagating manner to process each polarization, respectively. In experiment, we demonstrate a micro-spectrometer with 81 channels and channel wavelength spacing of 0.4 nm by employing a 32 × 32 AWG on the SOI platform. The footprint of the fabricated micro-spectrometer is only 1.1 × 2.35 mm 2 . Experimental results show that the spectrometer has on-chip losses ranging from –5.8 to –2.5 dB, noise level of better than 17 dB, polarization dependent wavelength shift (PD λ ) of less than 0.07 nm and polarization dependent loss (PDL) of less than 1.5 dB, for all 81 wavelength channels. The resolution of the micro-spectrometer is mainly dependent on the 3-dB bandwidth of each channel and is simulated to be ∼0.65 nm. The proposed ultracompact and polarization insensitive high-resolution on-chip spectrometer provides a very promising approach for achieving miniaturized spectrometer-on-a-chip with good performance for applications such as in fiber Bragg grating (FBG) sensor readout unit and optical waveguide sensor systems.
Novel High‐Resolution and Large‐Bandwidth Micro‐Spectrometer Using Multi‐Input Counter‐Propagating Arrayed Waveguide Grating and Dual‐Wavelength Grating Coupler on Silicon on Insulator

Jun Zou,Lingfeng Li,Changhui Wang,Yuan Zhuang,Xuyang Wang,Jinhua Hu,Shaobo Luo,Jian-Jun He

DOI: https://doi.org/10.1002/lpor.202200355

2022-01-01

Laser & Photonics Review

Abstract:Miniaturized micro‐spectrometers with high‐resolution and large‐bandwidth are of great importance for on‐site spectroscopic analysis applications. Here, a novel high‐resolution and large‐bandwidth micro‐spectrometer is presented, which operates at dual‐wavelength band by utilizing a (N + 3) × (N + 3) arrayed waveguide grating (AWG) and three dual‐wavelength grating couplers on a silicon‐on‐insulator (SOI) platform. The AWG working in a counter‐propagating manner can be viewed as two 3 × N AWGs, and the dual‐wavelength grating coupler acts as a prefilter. Three time‐division‐multiplexing inputs with wavelength spacings of 4/3 times that of N output waveguides are employed to improve the resolution of the micro‐spectrometer. Combining the corresponding outputs of three inputs, a micro‐spectrometer with resolution enhanced to one‐third wavelength spacing of output waveguides and effective channel number enlarged to 3 × (N − 2) is achieved, only using N output channels at each wavelength band. A micro‐spectrometer with 63 effective channels and resolutions of 0.5 and 0.442 nm at 1550 and 1310 nm bands, respectively, is experimentally demonstrated. The footprint of the fabricated micro‐spectrometer is 2 × 0.81 mm2, with measured on‐chip losses of −4.6 to −2.8 dB (−7.0 to −3.1 dB) and crosstalk levels < −18.5 (−16.8) dB at the 1550 (1310) nm band.
All‐Silicon Double‐Cavity Fourier‐Transform Infrared Spectrometer On‐Chip

Yomna M. Eltagoury,Yasser M. Sabry,Diaa A. Khalil

DOI: https://doi.org/10.1002/admt.201900441

IF: 6.8

2019-08-16

Advanced Materials Technologies

Abstract:<p>It is expected that miniaturized infrared spectrometers will enable spectral sensing anywhere. Their applications are almost infinite, including in smart devices, monitoring of air and water quality, healthcare wearables, among many others. Free‐space on‐chip, or photonic MEMS, interferometers are an attractive solution since they provide the required miniaturization while achieving the optical throughput needed for device sensitivity. A Fourier‐transform spectrometer on‐chip is presented based on cascading silicon broadband photonic MEMS cavities. The double‐cavity configuration shrinks the size of the optical engine dramatically with respect to the Michelson configuration, while overcoming the need for bringing the micromirrors in physical contact as in case of a single cavity. The all‐silicon interfaces provide low enough reflectivity such that the response of the cavity can be approximated by a single harmonic allowing Fourier transform operation of the spectrometer. The spectrometer is fabricated using deep etching of a silicon‐on‐insulator substrate allowing release of movable elements. The optical engine size is 300 µm × 400 µm. The device is tested in the wavelength range of 1.1–2.1 µm and spectroscopy measurement of different materials with 7.5 nm spectral resolution is demonstrated and compared to a reference spectrometer.</p>

materials science, multidisciplinary
Fourier-transform Spectrometer Chip Covering Visible Band on Silica Planar Waveguide

Xiao Ma,Jun Zou,Qiongchan Shao,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1016/j.optcom.2019.124599

IF: 2.4

2020-01-01

Optics Communications

Abstract:To minimise a spectrometer maximally, using a micro-electro-mechanical system or planar waveguide chip, has aroused interest in both academia and industry. This is because a portable and inexpensive spectral analysis tool has tremendous potential in various applications including scientific exploration, industrial inspection, and environmental protection. Here, we design, fabricate, and characterise a Fourier-transform spectrometer (FTS) chip consisting of 101 Mach-Zehnder interferometers (MZIs) with gradually varying optical path differences on a silica planar waveguide platform, aiming to cover the entire visible band. To ensure a wide-band operation while simultaneously compressing the size of the chip, wide-bending arm waveguides that can support high-order modes in a short wavelength range are employed in the design of the MZI array. The experimental result of our FTS chip shows its ability to analyse the visible spectrum with a minimum resolution of better than 10 nm and to reproduce the original spectrum with an accuracy of less than 0.5 nm. The successful implementation of the FTS chip based on a matured and low-cost silica planar lightwave circuit process makes it quite promising to realise mass production and widespread application.
Design of Compact Mid-Infrared Cooled Echelle Spectrometer Based on Toroidal Uniform-Line-Spaced (TULS) Grating

Qingyu Wang,Honghai Shen,Weiqi Liu,Jingzhong Zhang,Lingtong Meng

DOI: https://doi.org/10.3390/s22197291

IF: 3.9

2022-09-27

Sensors

Abstract:A traditional flat-panel spectrometer does not allow high-resolution observation and miniaturization simultaneously. In this study, a compact, high-resolution cross-dispersion spectrometer was designed based on the theoretical basis of echelle grating for recording an infrared spectrum. To meet the high-resolution observation and miniaturization design requirements, a reflective immersion grating was used as the primary spectroscopic device. To compress the beam aperture of the imaging system, the order-separation device of the spectrometer adopted toroidal uniform line grating, which had both imaging and dispersion functions in the spectrometer. The aberration balance condition of the toroidal uniform line grating was analyzed based on the optical path difference function of the concave grating, and dispersion characteristics of the immersed grating and thermal design of the infrared lens were discussed based on the echelle grating. An immersion echelle spectrometer optical system consisting of a culmination system, an immersed echelle grating, and a converged system was used. The spectrometer was based on the asymmetrical Czerny-Turner and Littrow mount designs, and it was equipped with a 320 × 256 pixel detector array. The designed wavelength range was 3.7–4.8 μm, the F-number was 4, and the central wavelength resolution was approximately 30,000. An infrared cooling detector was used. The design results showed that, in the operating band range, the root implied that the square diameter of the spectrometer spot diagram was less than 30 μm, the energy was concentrated in a pixel size range, and the spectrometer system design met the requirements.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
On-chip spectrometer using stratified waveguides filters

Ang Li,Yeshaiahu Fainman

DOI: https://doi.org/10.48550/arXiv.2002.09654

2020-11-29

Abstract:We present an ultra-compact single-shot spectrometer on silicon platform with broad operation bandwidth and high resolution. It consists of 32 stratified waveguide filters (SWFs) with diverse transmission spectra for sampling the unknown spectrum of the input signal and a specially designed ultra-compact structure for splitting the incident signal into 32 filters with low imbalance. Each SWF has a footprint less than 1um x 30um, while the 1x32 splitter and 32 filters in total occupy an area of about 35um x 260um, which to the best of our knowledge, is the smallest footprint spectrometer realized on silicon photonic platform. Experimental characteristics of the fabricated spectrometer demonstrate a broad operating bandwidth of 180nm centered at 1550nm and narrowband peaks with 0.45nm Full-Width-Half-Maximum (FWHM) can be clearly resolved. This concept can also be implemented using other material platforms for operation in optical spectral bands of interest for various applications.

Optics,Applied Physics
Ultracompact On-Chip Spectrometer Based on High-Index-contrast Grating

Zekun Zheng,Kaiyu Cui,Xusheng Cai,Hongbo Zhu,Jian Xiong,Yidong Huang,Wei Zhang,Xue Feng,Liu Fang

DOI: https://doi.org/10.1364/acpc.2020.m4a.36

2020-01-01

Abstract:We proposed an ultracompact on-chip spectrometer based on high-index-contrast grating. Simulation results show that, optical spectra are reconstructed with resolution as high as 2 nm and a compact footprint of only 60 μm ×48 μm.
Scalable On‐Chip Microdisk Resonator Spectrometer

Chunlei Sun,Zequn Chen,Yuting Ye,Kunhao Lei,Hui Ma,Maoliang Wei,Renjie Tang,Jianghong Wu,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1002/lpor.202200792

2023-01-01

LASER & PHOTONICS REVIEWS

Abstract:On-chip micro-spectrometers are sought after with great effort owing to extensive potential applications in mobile optical sensing and imaging. By multiplexing more physical channels, the reconstructive spectrometers based on the spectral-to-spatial mapping technique can improve the spectral range. However, this method is challenging to implement and sustain due to the increase in system complexity and the decrease of dynamic range or spectral resolution. Here, a micro-spectrometer utilizing a single tunable microdisk resonator (MDR) is demonstrated. Such a single MDR spectrometer has only one physical channel to receive all spectral components with a compact size, overcoming the trade-off among spectral resolution, spectral range, and dynamic range. Leveraging the wavelength and temperature-dependent response matrix, unknown spectra are reconstructed from their corresponding output light intensity vector. The fabricated device illustrates a high resolution of 0.01 nm for a dual peak and a medium resolution of 0.2 nm in the 20 nm spectral range. A wide variety of complex input spectra, including narrowband and broadband spectral signals, can be well recovered, exhibiting the robustness of the spectral reconstruction approach. Moreover, this proposed spectrometer exhibits ease of scalability and flexible configuration to a spectrometer array covering a set of desired and even discrete spectral ranges.
Ultra-compact scalable spectrometer with low power consumption

Junying Li,Chunlei Sun,Hui Ma,Bo Tang,Mengxue Qi,Jialing Jian,Zezhao Ju,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1364/OE.499892

IF: 3.8

2023-01-01

Optics Express

Abstract:An ultra-compact on-chip spectrometer was demonstrated based on an array of add-drop micro-donut resonators (MDRs). The filter array was thermally tuned by a single TiN microheater, enabling simultaneous spectral scanning across all physical channels. The MDR was designed to achieve large free spectral ranges with multimode waveguide bends and asymmetric coupling waveguides, covering a spectral range of 40 nm at the telecom waveband with five physical channels (which could be further expanded). Benefiting from the ultra-small device footprint of 150 mu m2, the spectrometer achieved a low power consumption of 16 mW. Additionally, it is CMOS-compatible and enables mass fabrication, which may have potential applications in personal terminals and the consumer industry.
An Eight-Channel 400 GHz-Spacing Etched Diffraction Grating Multi/Demultiplexer on a Nanophotonic Silicon-on-Insulator Platform

shen ao,qiu chen,hu ting,xu chao,jiang xiaoqing,li yubo,yang jianyi

DOI: https://doi.org/10.1088/0256-307X/30/8/084204

2013-01-01

Chinese Physics Letters

Abstract:An eight-channel 400 GHz-spacing planar waveguide multi/demultiplexer employing etched diffraction grating is designed and fabricated on a silicon-on-insulator platform with a 220 nm thick top layer. The design parameters are optimized by scalar diffraction simulation to obtain optimal performance with a small footprint of only 0.75 mm(2). A bi-level adiabatic taper is used to connect the input/output waveguide and the slab waveguide so as to reduce the insertion loss and the broadening of the diffraction angle of the propagating light. The device is fabricated in a two-step process with E-beam lithography and dry etching, and the alignment accuracy is 10 nm or even better. Measurements show that the insertion loss is 7.35 dB and the crosstalk between adjacent channels is about -15 dB. Ways to improve the performance are also investigated in detail.
Ultra-compact monolithically-integrated silicon single-microring spectrometer breaking the free-spectral-range limitation

Daoxin Dai,Long Zhang,Shihan Hong,Xiaolin Yi,Tangnan Chen,Dajian Liu,Pan Wang,Yaocheng Shi

DOI: https://doi.org/10.21203/rs.3.rs-3562753/v1

2023-01-01

Abstract:Highly-integrated spectrometers with performance excellence are extremely desired for various applications, such as consumer electronics and unmanned aerial vehicles. In this paper, an ultra-compact monolithically-integrated single-microring spectrometer on silicon is proposed and realized with a high resolution as well as a broad working window. In particular, an innovative scheme of utilizing the free spectral range (FSR) dispersion for a single-microring and strategically inducing resonant peaks red-shift more than twice of the FSR is proposed for the first time. In this way, the working window of the single-microring is significantly extended far beyond the FSR limitation with the assistance of intelligent algorithm. Moreover, the single-microring is realized with a high-Q factor by introducing ultra-low-loss broadened optical waveguides designed with modified-Euler curves, resulting in ultra-narrow-linewidth responses and ultra-high-resolution spectrum measurement. The monolithically-integrated silicon single-microring spectrometer is experimentally demonstrated with a resolution as high as 0.02 nm in a broad working window of 66 nm (which is >15 times larger than the microring's FSR). Besides, the present on-chip spectrometer is fabricated with standard processes for silicon photonics, showing an ultra-compact footprint of 370×110 μm2, which is the smallest monolithically-integrated spectrometer with the highest channel-to-footprint ratio (8.3×104 mm−2) to date. The present spectrometer is expected to be very attractive for realizing low-cost portable sensing modules and lab-on-a-chip systems because of the performance excellence, the footprint compactness and the integration density.
Integrated Silicon-on-Insulator Spectrometer With Single Pixel Readout for Mid-Infrared Spectroscopy

G. Roelkens,R. Baets,Jeroen Allaert,A. Vasiliev,J. Van Campenhout,M. Muneeb

DOI: https://doi.org/10.1109/JSTQE.2018.2820169

IF: 4.9

2018-03-28

IEEE Journal of Selected Topics in Quantum Electronics

Abstract:Mid-infrared spectroscopy in the 2–4 <inline-formula><tex-math notation="LaTeX">$\mu$</tex-math> </inline-formula>m wavelength range is of cardinal value for many sensing applications. Current solutions involve bulky and expensive systems to operate. Silicon-on-Insulator (SOI) waveguide technology offers means to miniaturize the different parts of the spectrometer. However, the development of on-chip detectors for the mid-infrared wavelength range is in its infancy and the characteristics are not on par with their discrete (cooled) counterparts. In this work, a compact and cheap mid-infrared spectrometer is realized by integrating a SOI arrayed waveguide grating (AWG) spectrometer operating in the 2.3 <inline-formula><tex-math notation="LaTeX">$\mu$</tex-math></inline-formula>m wavelength range with a high performance mid-infrared photodiode. The AWG has 12 output channels with a spacing of 225 GHz (4 nm) and a free spectral range of 3150 GHz (56 nm), which are simultaneously collected by a single, transistor outline (TO)-packaged extended InGaAs PIN photodiode. The response of each AWG channel is discerned by time-sequentially modulating the optical power in each output channel using integrated Mach-Zehnder based thermo-optic modulators with a <inline-formula><tex-math notation="LaTeX">$\pi$</tex-math></inline-formula>-phase shift power consumption of <inline-formula><tex-math notation="LaTeX">$\approx$</tex-math></inline-formula>50 mW. As an example, the absorption spectrum of a 0.5 mm thick polydimethylsiloxane sheet is sampled and compared to a benchtop spectrometer to good agreement.

Engineering,Physics,Materials Science

Silicon-On-Insulator Based Miniature Integrated Spectrometer Using Echelle Diffraction Grating

Echelle Diffraction Grating Based High-Resolution Spectrometer-on-chip on SiON Waveguide Platform

Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array

An Echelle Diffraction Grating for Imaging Spectrometer

Imaging Spectrometers Based on Waveguide Echelle Diffraction Gratings

Design of Compact Wide-Band Triple Grating Imaging Spectrometer Based on Freeform Surfaces

Polarization Insensitive Arrayed-Input Spectrometer Chip Based on Silicon-on-insulator Echelle Grating

A Compact Integrated Spectrometer Based on SU-8 Polymer Using Echelle Diffraction Grating

High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array

A Polarization-Insensitive High-Resolution Micro-Spectrometer Using (N + 3) × (N + 3) Arrayed Waveguide Grating on SOI Platform

Novel High‐Resolution and Large‐Bandwidth Micro‐Spectrometer Using Multi‐Input Counter‐Propagating Arrayed Waveguide Grating and Dual‐Wavelength Grating Coupler on Silicon on Insulator

All‐Silicon Double‐Cavity Fourier‐Transform Infrared Spectrometer On‐Chip

Fourier-transform Spectrometer Chip Covering Visible Band on Silica Planar Waveguide

Design of Compact Mid-Infrared Cooled Echelle Spectrometer Based on Toroidal Uniform-Line-Spaced (TULS) Grating

On-chip spectrometer using stratified waveguides filters

Ultracompact On-Chip Spectrometer Based on High-Index-contrast Grating

Scalable On‐Chip Microdisk Resonator Spectrometer

Ultra-compact scalable spectrometer with low power consumption

An Eight-Channel 400 GHz-Spacing Etched Diffraction Grating Multi/Demultiplexer on a Nanophotonic Silicon-on-Insulator Platform

Ultra-compact monolithically-integrated silicon single-microring spectrometer breaking the free-spectral-range limitation

Integrated Silicon-on-Insulator Spectrometer With Single Pixel Readout for Mid-Infrared Spectroscopy