Echelle Diffraction Grating Based High-Resolution Spectrometer-on-chip on SiON Waveguide Platform

Xiao Ma,Mingyu Li,Jian-Jun He
DOI: https://doi.org/10.3788/col201311.032501
IF: 2.56
2013-01-01
Chinese Optics Letters
Abstract:We demonstrate a spectrometer-on-a-chip based on echelle diffraction grating (EDG) in silicon oxynitride (SiON) waveguides for operation in 850nm wavelength range. The chip comprises 120 output waveguides with 0.25 nm spacing and has a size of only 11mm×6mm. The measured adjacent channel crosstalk is close to 30 dB, the 3dB channel bandwidth is ≪ 0.1 nm and the channel non-uniformity is 3dB for wavelength from 838nm to 852nm.
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