Fabry-perot Cavity Array Based On-Chip Waveguide Spectrometer

Jinpeng Pang,Xiao Ma,Jianjun He

DOI: https://doi.org/10.1109/icocn53177.2021.9563694

2021-01-01

Abstract:A Fourier-transform Raman integrated spectrometer based on 650 Fabry-Perot-cavity array with a total size of 0.4 cm2 is proposed. It can work from 820 nm to 930 nm with a resolution of 5 cm-1.

What problem does this paper attempt to address?

Fourier-transform Spectrometer Chip Covering Visible Band on Silica Planar Waveguide

Xiao Ma,Jun Zou,Qiongchan Shao,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1016/j.optcom.2019.124599

IF: 2.4

2020-01-01

Optics Communications

Abstract:To minimise a spectrometer maximally, using a micro-electro-mechanical system or planar waveguide chip, has aroused interest in both academia and industry. This is because a portable and inexpensive spectral analysis tool has tremendous potential in various applications including scientific exploration, industrial inspection, and environmental protection. Here, we design, fabricate, and characterise a Fourier-transform spectrometer (FTS) chip consisting of 101 Mach-Zehnder interferometers (MZIs) with gradually varying optical path differences on a silica planar waveguide platform, aiming to cover the entire visible band. To ensure a wide-band operation while simultaneously compressing the size of the chip, wide-bending arm waveguides that can support high-order modes in a short wavelength range are employed in the design of the MZI array. The experimental result of our FTS chip shows its ability to analyse the visible spectrum with a minimum resolution of better than 10 nm and to reproduce the original spectrum with an accuracy of less than 0.5 nm. The successful implementation of the FTS chip based on a matured and low-cost silica planar lightwave circuit process makes it quite promising to realise mass production and widespread application.
Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array

Xiao Ma,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1109/jphot.2013.2250944

IF: 2.4

2013-01-01

IEEE Photonics Journal

Abstract:We demonstrate an integrated spectrometer-on-a-chip composed of an echelle diffraction grating (EDG) and metal-semiconductor-metal (MSM) waveguide photodetector array based on silicon-on-insulator (SOI). In the passive section, silicon oxynitride (SiON) is chosen as the material for the waveguide core and is deposited after selectively removing the top silicon layer of the SOI wafer. The buried silicon dioxide layer of the SOI wafer functions as the lower cladding for the SiON core waveguide. In the active section, the MSM photodetector array is fabricated on the top silicon layer of the SOI waveguide with a pitch width of 7.5 mu m. With the butt-coupling structure, a responsivity of 0.41 A/W is obtained at 850 nm. Based on the CMOS-compatible fabrication process, we have fabricated a 60-channel spectrometer with a chip size of 9 mm x 6 mm operating around 850 nm. The measured channel spacing is 0.494 nm, with an adjacent channel crosstalk around 18 dB. The channel nonuniformity is less than 1.5 dB. The CMOS-compatible spectrometer with integrated silicon photodetector array can provide a low-cost solution for high-resolution on-chip spectral analysis for visible and near-infrared light with the wavelength below 1100 nm.
High‐Resolution 2D Quasi‐Distributed Optical Sensing with On‐Chip Multiplexed FSR‐Free Nanobeam Cavity Array

Renjie Tang,Chunlei Sun,Kangjian Bao,Zequn Chen,Zezhao Ju,Maoliang Wei,Yingchun Wu,Jianghong Wu,Kai Xu,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1002/lpor.202300828

2023-01-01

Laser & Photonics Review

Abstract:On-chip free spectral range (FSR)-free optical filter with a compact footprint is crucial for developing emerging sensing applications, as it allows for the optimal utilization of extensive optical bandwidth. Despite being an important area of technology, on-chip optical sensing system has faced challenges in channel count, particularly due to the limited FSR, large footprint, and loss of the wavelength-selective filter unit. To address these challenges, a scalable nanobeam cavity prototype with a length of approximate to 21 mu m based on the asymmetric Bragg mirrors is presented. By engineering the band structure of the nanobeam cavity, the stopband can be flexibly tuned to achieve an FSR-free spectral response within 350 nm. Two 25-nanobeam-cavity arrays are fabricated with a footprint of 215 x 120 mu m2 and an average insertion loss of approximate to 3.2 dB over a broad wavelength range. To the best of the authors' knowledge, this is the largest-channel-count multiplexed micro-cavity array on a single waveguide, reported to date. As a proof-of-principle application, the 2D high-spatial-resolution temperature distribution sensing is experimentally demonstrated. This work provides new insight into the design of ultra-compact FSR-free filters and will give birth to numerous charming applications that make use of the broad bandwidth capabilities of optics while occupying minimal space. A scalable nanobeam cavity prototype is proposed, which overcomes the limitation of free spectral range (FSR) by engineering the band structure of the nanobeam cavity using asymmetric Bragg mirrors. In this prototype, 25 basic units are successfully cascaded in series, forming a 5 x 5 compact sensing matrix. The proof-of-principle application of 2D high-spatial-resolution temperature distribution sensing is experimentally demonstrated.image
Imaging Spectrometers Based on Waveguide Echelle Diffraction Gratings

Minyue Yang,Han Wang,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1109/piers.2016.7734723

2016-01-01

Abstract:A method to integrate the spectroscopic system of the push-broom scanning imaging spectrometer onto a single chip is proposed using echelle diffraction grating to split the light in the near infrared range according to different wavelengths. The on-chip spectrometer consists of an optical on-off switch array, a multi-input echelle diffraction grating (EDG) and a detector array. The designed EDG has a channel spacing of about 4nm and up to 129 channels corresponding to wavelengths from 1.25 μm to 1.75 μm with channel uniformity less than 2 dB. Based on the 3 μm SOI platform the device is polarization insensitive. The switch array is integrated on the single mode ridge input waveguides, allowing the 129 input waveguides to be selected one-by-one in a time division multiplexed fashion. Since the switch can be scanned very fast (less than 10 microseconds), the imaging spectrometer can be operated in push-broom mode. Due to the CMOS compatibility, the waveguide EDG based imaging spectrometer can provide a low-cost solution for remote sensing on unmanned aerial vehicles, with advantages of small size, light weight vibration-proof, and high scalability.
Scalable Miniature On-chip Fourier Transform Spectrometer For Raman Spectroscopy

Sarp Kerman,Xiao Luo,Zuoqin Ding,Zhewei Zhang,Zhuo Deng,Xiaofei Qin,Yuran Xu,Shuhua Zhai,Chang Chen

2024-11-02

Abstract:Miniaturized spectrometers for Raman spectroscopy have the potential to open up a new chapter in sensing. Raman spectroscopy is essential for material characterization and biomedical diagnostics, however, its weak signal and the need for sub-nanometer resolution pose challenges. Conventional spectrometers, with footprints proportional to optical throughput and resolution, are difficult to integrate into compact devices such as wearables. Waveguide-based Fourier Transform Spectrometers (FTS) enable compact spectrometers, and multi-aperture designs can achieve high throughput for applications such as Raman spectroscopy, however, experimental research in this domain remains limited. In this work, we present a multi-aperture SiN waveguide-based FTS overcoming these limitations and enabling Raman spectroscopy of isopropyl alcohol, glucose, Paracetamol, and Ibuprofen with enhanced throughput. Our spectrometer chip, fabricated on a 200 mm SiN wafer, with 160 edge-coupled waveguide apertures connected to an array of ultra-compact interferometers and a small footprint of just 1.6 mm x 4.8 mm, achieves a spectral range of 40 nm and a resolution of 0.5 nm. Experimental results demonstrate that least absolute shrinkage and selection operator (LASSO) regression significantly enhances Raman spectrum reconstruction. Our work on waveguide-based spectrometry paves the way for integrating accurate and compact Raman sensors into consumer electronics and space exploration instruments.

Optics,Applied Physics
A Polarization-Insensitive High-Resolution Micro-Spectrometer Using (N + 3) × (N + 3) Arrayed Waveguide Grating on SOI Platform

Jun Zou,Lingfeng Li,Yuan Zhuang,Changhui Wang,Ming Zhang,Zichun Le,Xuyang Wang,Gaozhe Cai,Shilun Feng,Jian-Jun He

DOI: https://doi.org/10.1109/jlt.2022.3209233

IF: 4.7

2022-01-01

Journal of Lightwave Technology

Abstract:Ultra-compact on-chip spectrometers with high resolution and large bandwidth play a crucial role in miniaturized spectroscopic analysis systems. Here we present a novel polarization-insensitive micro-spectrometer with high resolution and large bandwidth based on a ( N + 3) × ( N + 3) arrayed waveguide grating (AWG) on silicon-on-insulator (SOI) platform. The proposed AWG can be viewed as two same 3 × N AWGs with each one having three input waveguides with channel spacing of 4/3 Δ λ and N output waveguides with channel spacing of Δ λ . The three input waveguides are time division multiplexed, i.e., they are excited one by one in sequence. As a result, combining all spectral responses of each input, a micro-spectrometer with channel wavelength spacing enhanced to one-third Δ λ and channel number enlarged to 3 × ( N – 2) is achieved, only using N output channels. The polarization diversity scheme is utilized to address the polarization sensitive issue of silicon nano-waveguide, i.e., the AWG operates at a counter-propagating manner to process each polarization, respectively. In experiment, we demonstrate a micro-spectrometer with 81 channels and channel wavelength spacing of 0.4 nm by employing a 32 × 32 AWG on the SOI platform. The footprint of the fabricated micro-spectrometer is only 1.1 × 2.35 mm 2 . Experimental results show that the spectrometer has on-chip losses ranging from –5.8 to –2.5 dB, noise level of better than 17 dB, polarization dependent wavelength shift (PD λ ) of less than 0.07 nm and polarization dependent loss (PDL) of less than 1.5 dB, for all 81 wavelength channels. The resolution of the micro-spectrometer is mainly dependent on the 3-dB bandwidth of each channel and is simulated to be ∼0.65 nm. The proposed ultracompact and polarization insensitive high-resolution on-chip spectrometer provides a very promising approach for achieving miniaturized spectrometer-on-a-chip with good performance for applications such as in fiber Bragg grating (FBG) sensor readout unit and optical waveguide sensor systems.
Miniature Spectrometer Based on a Fourier Transform Spectrometer Chip and a Commercial Photodetector Array

Xiao Ma,Jun Zou,Wenhuan Li,Jian-Jun He

DOI: https://doi.org/10.3788/col201917.123001

IF: 2.56

2019-01-01

Chinese Optics Letters

Abstract:We demonstrate a novel type of miniature spectrometer based on a Fourier transform spectrometer(FTS) chip with a dense output array and a commercial photodetector(PD) array. The FTS chip has an output array cycle of 20 μm and consists of 51 Mach–Zehnder interferometers(MZIs), and the PD array is a commercial linear charged coupled device(CCD). An achromatic triplet lens is used to image the MZI output interferogram onto the CCD with a small aberration. Our experiment result shows that a free spectral range(FSR) from 489 nm to 584 nm and a retrieved spectral resolution of 3.5 nm at 532 nm are obtained. The achieved properties show that our spectrometer has the potential to outperform the best commercial compact one in terms of most performance indices.
Ultra-compact scalable spectrometer with low power consumption

Junying Li,Chunlei Sun,Hui Ma,Bo Tang,Mengxue Qi,Jialing Jian,Zezhao Ju,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1364/OE.499892

IF: 3.8

2023-01-01

Optics Express

Abstract:An ultra-compact on-chip spectrometer was demonstrated based on an array of add-drop micro-donut resonators (MDRs). The filter array was thermally tuned by a single TiN microheater, enabling simultaneous spectral scanning across all physical channels. The MDR was designed to achieve large free spectral ranges with multimode waveguide bends and asymmetric coupling waveguides, covering a spectral range of 40 nm at the telecom waveband with five physical channels (which could be further expanded). Benefiting from the ultra-small device footprint of 150 mu m2, the spectrometer achieved a low power consumption of 16 mW. Additionally, it is CMOS-compatible and enables mass fabrication, which may have potential applications in personal terminals and the consumer industry.
Echelle Diffraction Grating Based High-Resolution Spectrometer-on-chip on SiON Waveguide Platform

Xiao Ma,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.3788/col201311.032501

IF: 2.56

2013-01-01

Chinese Optics Letters

Abstract:We demonstrate a spectrometer-on-a-chip based on echelle diffraction grating (EDG) in silicon oxynitride (SiON) waveguides for operation in 850nm wavelength range. The chip comprises 120 output waveguides with 0.25 nm spacing and has a size of only 11mm×6mm. The measured adjacent channel crosstalk is close to 30 dB, the 3dB channel bandwidth is ≪ 0.1 nm and the channel non-uniformity is 3dB for wavelength from 838nm to 852nm.
Scalable On‐Chip Microdisk Resonator Spectrometer

Chunlei Sun,Zequn Chen,Yuting Ye,Kunhao Lei,Hui Ma,Maoliang Wei,Renjie Tang,Jianghong Wu,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1002/lpor.202200792

2023-01-01

LASER & PHOTONICS REVIEWS

Abstract:On-chip micro-spectrometers are sought after with great effort owing to extensive potential applications in mobile optical sensing and imaging. By multiplexing more physical channels, the reconstructive spectrometers based on the spectral-to-spatial mapping technique can improve the spectral range. However, this method is challenging to implement and sustain due to the increase in system complexity and the decrease of dynamic range or spectral resolution. Here, a micro-spectrometer utilizing a single tunable microdisk resonator (MDR) is demonstrated. Such a single MDR spectrometer has only one physical channel to receive all spectral components with a compact size, overcoming the trade-off among spectral resolution, spectral range, and dynamic range. Leveraging the wavelength and temperature-dependent response matrix, unknown spectra are reconstructed from their corresponding output light intensity vector. The fabricated device illustrates a high resolution of 0.01 nm for a dual peak and a medium resolution of 0.2 nm in the 20 nm spectral range. A wide variety of complex input spectra, including narrowband and broadband spectral signals, can be well recovered, exhibiting the robustness of the spectral reconstruction approach. Moreover, this proposed spectrometer exhibits ease of scalability and flexible configuration to a spectrometer array covering a set of desired and even discrete spectral ranges.
Novel High‐Resolution and Large‐Bandwidth Micro‐Spectrometer Using Multi‐Input Counter‐Propagating Arrayed Waveguide Grating and Dual‐Wavelength Grating Coupler on Silicon on Insulator

Jun Zou,Lingfeng Li,Changhui Wang,Yuan Zhuang,Xuyang Wang,Jinhua Hu,Shaobo Luo,Jian-Jun He

DOI: https://doi.org/10.1002/lpor.202200355

2022-01-01

Laser & Photonics Review

Abstract:Miniaturized micro‐spectrometers with high‐resolution and large‐bandwidth are of great importance for on‐site spectroscopic analysis applications. Here, a novel high‐resolution and large‐bandwidth micro‐spectrometer is presented, which operates at dual‐wavelength band by utilizing a (N + 3) × (N + 3) arrayed waveguide grating (AWG) and three dual‐wavelength grating couplers on a silicon‐on‐insulator (SOI) platform. The AWG working in a counter‐propagating manner can be viewed as two 3 × N AWGs, and the dual‐wavelength grating coupler acts as a prefilter. Three time‐division‐multiplexing inputs with wavelength spacings of 4/3 times that of N output waveguides are employed to improve the resolution of the micro‐spectrometer. Combining the corresponding outputs of three inputs, a micro‐spectrometer with resolution enhanced to one‐third wavelength spacing of output waveguides and effective channel number enlarged to 3 × (N − 2) is achieved, only using N output channels at each wavelength band. A micro‐spectrometer with 63 effective channels and resolutions of 0.5 and 0.442 nm at 1550 and 1310 nm bands, respectively, is experimentally demonstrated. The footprint of the fabricated micro‐spectrometer is 2 × 0.81 mm2, with measured on‐chip losses of −4.6 to −2.8 dB (−7.0 to −3.1 dB) and crosstalk levels < −18.5 (−16.8) dB at the 1550 (1310) nm band.
Static FT Imaging Spectrometer Based on a Modified Waveguide MZI Array.

Minyue Yang,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1364/ol.42.002675

IF: 3.6

2017-01-01

Optics Letters

Abstract:We proposed a large aperture push-broom static Fourier transform (FT) imaging spectrometer for hyper-spectral imaging. The spectroscopic system was based on the silicon-on-insulator (SOI) platform, consisting of spot size converters, a Mach-Zehnder interferometer (MZI) array, and a detector array. The arm length differences of the 201 MZI arrays are linearly varied. It is one on-chip FT spectrometer operating in a large spectral range from 1100 to 1700 nm with a resolution of 24 cm-1 and small foot print (chip size: 11 mm×15 mm). The waveguide-MZI-based large aperture push-broom FT spectrometer can provide a compact solution for high spectral resolution remote sensing in both the fore-optic lens and the spectroscopic system.
Fano-resonance-based ultra-high-resolution ratio-metric wavelength monitor on silicon.

Gencheng Wang,Ao Shen,Changyun Zhao,Longzhi Yang,Tingge Dai,Yuehai Wang,Yubo Li,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1364/OL.41.000544

IF: 3.6

2016-01-01

Optics Letters

Abstract:An integrated ultra-high-resolution ratio-metric wavelength monitor (RMWM) with compact size based on slope tunable Fano resonance is demonstrated on silicon. The Fano resonance is generated by adding an asymmetric microring inside and coupling with the outer ring to produce a nonlinear phase shift. The slope tunability is achieved by controlling the microheaters to adjust the phase condition. Two asymmetric embedded microring resonators (AEMR) are functioned as edge filters and designed to achieve an "X-type" spectral response in a particular wavelength range. An ultra-high resolution of 0.8 pm in a 0.47 nm wide wavelength range is experimentally demonstrated. This device could be applied in on-chip high-sensitivity wavelength monitoring sensing. (C) 2016 Optical Society of America
Short‐Wave Infrared Chip‐Spectrometer by Using Laser Direct‐Writing Grayscale Lithography

Zhiyi Xuan,Zi Wang,Qingquan Liu,Songlei Huang,Bo Yang,Liyi Yang,Zhiqin Yin,Maobin Xie,Chenlu Li,Jingyi Yu,Shaowei Wang,Wei Lu

DOI: https://doi.org/10.1002/adom.202200284

IF: 9

2022-07-19

Advanced Optical Materials

Abstract:Short‐wave infrared chip‐spectrometer based on Fabry–Perot microcavities array is fabricated by using fast and low‐cost UV laser direct‐writing grayscale lithography. The ultra‐compact chip‐spectrometer has a wide spectral range of 900–1700 nm with only 20 detector pixels and a reconstruction algorithm. Spectral resolution of 2 nm is achieved by 50 detector pixels. It is promising for applications like smart‐phone and other miniature spectrometers. Short‐wave infrared (SWIR) information is critical for material analysis, imaging sensing, and other fields. To acquire SWIR spectrum with compact devices, strategies for reconstructive microspectrometer have emerged, such as photonic crystal and quantum dot filter. However, the current SWIR microspectrometer needs many filters with insufficient resolution. In this work, the authors develop a SWIR chip‐spectrometer based on Fabry–Perot microcavities array which can be fabricated by using fast and low‐cost UV laser direct‐writing grayscale lithography. The ultra‐compact chip‐spectrometer can work in a very wide range from 900 to 1700 nm with only 20 detector pixels and a reconstruction algorithm. The spectral resolution achieves 2 nm by 50 pixels set and 5 nm by 20 pixels set at SWIR range, which is 3 times higher, with 3.9 times less units number, than for recently reported SWIR quantum dot spectrometers. To the best of our knowledge, this is a minimum high‐resolution SWIR InGaAs detector based chip‐spectrometer which can work in the whole SWIR band with only 20 detector pixels. It has great potential for applications in smart‐phone or other miniature portable spectrometers.

materials science, multidisciplinary,optics
Integrated Microring Spectrometer with In-Hardware Compressed Sensing to Break the Resolution-Bandwidth Limit for General Continuous Spectrum Analysis

Chunlei Sun,Zequn Chen,Yuting Ye,Yang Weng,Kunhao Lei,Hui Ma,Maoliang Wei,Chuyu Zhong,Hongtao Lin,Lan Li

DOI: https://doi.org/10.1002/lpor.202300291

2023-01-01

LASER & PHOTONICS REVIEWS

Abstract:Microspectrometers have numerous applications in mobile optical sensing due to their dramatic advantages of compact size, light weight, and low power consumption. Reconstructive spectrometers, based on computational algorithms, have garnered considerable interest as they exhibit superior resolution or spectral bandwidth. However, existing reconstructive spectrometer designs face challenges in spectral applicability, algorithm robustness, and the resolution-bandwidth limit. Here, a reconstructive spectrometer that utilizes a microring resonator (MRR) is proposed to achieve compressed sensing in hardware by decomposing an arbitrary continuous spectrum into a series of simple comb spectra. Owing to the presparse operation of the MRR, one needs to construct the comb spectra with a known line shape, only leaving the amplitude to be solved. Consequent random gratings measure the comb spectra, which are reconstructed with high robustness. Thanks to the independent engineering of spectral resolution and bandwidth, the approach breaks the traditional resolution-bandwidth limit. A narrowband signal of a dual peak at 0.2 nm and a broadband spectrum with a large spectral bandwidth of 60 nm and 300 spectral channels using only eight physical channels is retrieved, achieving an ultrahigh reconstructive compression ratio of 37.5. This work opens up the possibility of on-site spectral spectroscopy applications for the lab-on-a-chip system.
Double Tunable Micro-ring Enhanced Fourier Transform Spectrometer

Yanlu Wang,Zhiping Yang,Qiongchan Shao,Jian-Jun He,Mingyu Li

DOI: https://doi.org/10.1117/12.2573603

2020-01-01

Abstract:It is a tradeoff between bandwidth and resolution for the on chip Fourier transform spectrometer. To solve this problem, a single ring filter enhanced on chip Fourier transform spectrometer was proposed recently. In this paper, the performance of the cascaded double-ring enhanced Fourier transform on chip spectrometer was investigated theoretically. The cascaded two tunable Micro-ring resonators forms a large narrow band filter with a larger free spectral range (FSR) than the single ring, which reduces the requirement of the Fourier transform spectrometer spectral resolution. The spectrum of the input is retrieved by the Fourier transform algorithm with dispersion correction. The cascaded double-ring enhanced Fourier transform spectrometer has a high resolution (0.3 nm) and a large bandwidth (1500nm-1600nm). The fabrication process is compatibility with CMOS process. It can be easily integrated with other silicon-based optical devices.
Fiber spectrum analyzer based on planar waveguide array aligned to a camera without lens

Xinhong Jiang,Zhifang Yang,Lin Wu,Zhangqi Dang,Zhenming Ding,Zexu Liu,Qing Chang,Ziyang Zhang

DOI: https://doi.org/10.48550/arXiv.2205.03054

2022-05-06

Abstract:We propose and experimentally demonstrate a fiber spectrum analyzer based on a planar waveguide chip butt-coupled with an input fiber and aligned to a standard camera without any free-space optical elements. The chip consists of a single-mode waveguide to connect with the fiber, a beam broadening area, and a waveguide array in which the lengths of the waveguides are designed for both wavelength separation and beam focusing. The facet of the chip is diced open so that the outputs of the array form a near-field emitter. The far field are calculated by the Rayleigh-Sommerfeld diffraction integral. We show that the chip can provide a focal depth on the millimeter scale, allowing relaxed alignment to the camera without any fine-positioning stage. Two devices with 120 and 220 waveguides are fabricated on the polymer waveguide platform. The measured spectral width are 0.63 nm and 0.42 nm, respectively. This simple and practical approach may lead to the development of a spectrum analyzer for fiber that is easily mountable to any commercial camera, thereby avoiding the complication for customized detectors as well as electronic circuits afterwards.

Optics,Applied Physics
An Echelle Diffraction Grating for Imaging Spectrometer

Minyue Yang,Han Wang,Mingyu Li,Jian-Jun He

DOI: https://doi.org/10.1117/12.2236666

2016-01-01

Abstract:We demonstrate an echelle diffraction grating (EDG) of 17 input waveguides and 33 output waveguides. For each input waveguide, only 17 of 33 output waveguides are used, receiving light ranging from 1520 nm to 1600 nm wavelength. The channel spacing of the EDG is 5 nm, with loss of -6dB and crosstalk of -17dB for center input waveguide and -15dB for edge input waveguides. Based on the 3 mu m SOI platform the device is polarization insensitive. As a simple version of EDG spectrometer it is designed to be a part of the on-chip spectroscopic system of the push-broom scanning imaging spectrometer. The whole on-chip spectrometer consists of an optical on-off switch array, a multi-input EDG and detector array. With the help of on-off switch array the multiple input waveguides of the EDG spectrometer could work in a time division multiplexed fashion. Since the switch can scan very fast (less than 10 microseconds), the imaging spectrometer can be operated in push-broom mode. Due to the CMOS compatibility, the 17_channel EDG scales 2.5x3 mm(2). The full version of EDG spectrometer is designed to have 129 input waveguides and 257 output waveguides (129 output channel for each input waveguide), working in wavelength ranging from 1250 nm to 1750 nm, and had similar blazed facet size with the 17_channel one, which means similar fabrication tolerance in grating facets. The waveguide EDG based imaging spectrometer can provide a low-cost solution for remote sensing on unmanned aerial vehicles, with advantages of small size, light weight, vibration-proof, and high scalability.
High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array

Keqi Ma,Kaixuan Chen,Ning Zhu,Liu Liu,Sailing He

DOI: https://doi.org/10.1109/JPHOT.2018.2888592

IF: 2.4

2019-01-01

IEEE Photonics Journal

Abstract:We design a 121-channel on-chip spectrometer based on an echelle grating with densely packed waveguide array on 220-nm silicon-on-insulator platform. It offers a high spectral resolution of 0.5 nm in a 3 · 3 mm2 footprint, covering a spectral range of 60 nm near the central wavelength of 1550 nm. We fabricate the spectrometer with 20 channels for verification of the design, which is limited by our...
PbS-based SWIR micro-spectrometer with on-chip Fabry–Perot filter array

Taipeng Li,Ge Mu,Qun Hao,Xin Tang

DOI: https://doi.org/10.1364/ol.527883

IF: 3.6

2024-09-21

Optics Letters

Abstract:Taipeng Li, Ge Mu, Qun Hao, Xin Tang Miniaturized and portable on-chip spectrometers have been widely explored to facilitate many applications including chemical analysis, ... [Opt. Lett. 49, 5435-5438 (2024)]

optics

Fabry-perot Cavity Array Based On-Chip Waveguide Spectrometer

Fourier-transform Spectrometer Chip Covering Visible Band on Silica Planar Waveguide

Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array

High‐Resolution 2D Quasi‐Distributed Optical Sensing with On‐Chip Multiplexed FSR‐Free Nanobeam Cavity Array

Imaging Spectrometers Based on Waveguide Echelle Diffraction Gratings

Scalable Miniature On-chip Fourier Transform Spectrometer For Raman Spectroscopy

A Polarization-Insensitive High-Resolution Micro-Spectrometer Using (N + 3) × (N + 3) Arrayed Waveguide Grating on SOI Platform

Miniature Spectrometer Based on a Fourier Transform Spectrometer Chip and a Commercial Photodetector Array

Ultra-compact scalable spectrometer with low power consumption

Echelle Diffraction Grating Based High-Resolution Spectrometer-on-chip on SiON Waveguide Platform

Scalable On‐Chip Microdisk Resonator Spectrometer

Novel High‐Resolution and Large‐Bandwidth Micro‐Spectrometer Using Multi‐Input Counter‐Propagating Arrayed Waveguide Grating and Dual‐Wavelength Grating Coupler on Silicon on Insulator

Static FT Imaging Spectrometer Based on a Modified Waveguide MZI Array.

Fano-resonance-based ultra-high-resolution ratio-metric wavelength monitor on silicon.

Short‐Wave Infrared Chip‐Spectrometer by Using Laser Direct‐Writing Grayscale Lithography

Integrated Microring Spectrometer with In-Hardware Compressed Sensing to Break the Resolution-Bandwidth Limit for General Continuous Spectrum Analysis

Double Tunable Micro-ring Enhanced Fourier Transform Spectrometer

Fiber spectrum analyzer based on planar waveguide array aligned to a camera without lens

An Echelle Diffraction Grating for Imaging Spectrometer

High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array

PbS-based SWIR micro-spectrometer with on-chip Fabry–Perot filter array