Short‐Wave Infrared Chip‐Spectrometer by Using Laser Direct‐Writing Grayscale Lithography

Zhiyi Xuan,Zi Wang,Qingquan Liu,Songlei Huang,Bo Yang,Liyi Yang,Zhiqin Yin,Maobin Xie,Chenlu Li,Jingyi Yu,Shaowei Wang,Wei Lu
DOI: https://doi.org/10.1002/adom.202200284
IF: 9
2022-07-19
Advanced Optical Materials
Abstract:Short‐wave infrared chip‐spectrometer based on Fabry–Perot microcavities array is fabricated by using fast and low‐cost UV laser direct‐writing grayscale lithography. The ultra‐compact chip‐spectrometer has a wide spectral range of 900–1700 nm with only 20 detector pixels and a reconstruction algorithm. Spectral resolution of 2 nm is achieved by 50 detector pixels. It is promising for applications like smart‐phone and other miniature spectrometers. Short‐wave infrared (SWIR) information is critical for material analysis, imaging sensing, and other fields. To acquire SWIR spectrum with compact devices, strategies for reconstructive microspectrometer have emerged, such as photonic crystal and quantum dot filter. However, the current SWIR microspectrometer needs many filters with insufficient resolution. In this work, the authors develop a SWIR chip‐spectrometer based on Fabry–Perot microcavities array which can be fabricated by using fast and low‐cost UV laser direct‐writing grayscale lithography. The ultra‐compact chip‐spectrometer can work in a very wide range from 900 to 1700 nm with only 20 detector pixels and a reconstruction algorithm. The spectral resolution achieves 2 nm by 50 pixels set and 5 nm by 20 pixels set at SWIR range, which is 3 times higher, with 3.9 times less units number, than for recently reported SWIR quantum dot spectrometers. To the best of our knowledge, this is a minimum high‐resolution SWIR InGaAs detector based chip‐spectrometer which can work in the whole SWIR band with only 20 detector pixels. It has great potential for applications in smart‐phone or other miniature portable spectrometers.
materials science, multidisciplinary,optics
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