Abstract:The mid-Infrared wavelength range (2-20 µm), so-called fingerprint region, contains the very sharp vibrational and rotational resonances of many chemical and biological substances. Thereby, on-chip absorption-spectrometry-based sensors operating in the mid-Infrared (mid-IR) have the potential to perform high-precision, label-free, real-time detection of multiple target molecules within a single sensor, which makes them an ideal technology for the implementation of lab-on-a-chip devices. Benefiting from the great development realized in the telecom field, silicon photonics is poised to deliver ultra-compact efficient and cost-effective devices fabricated at mass scale. In addition, Si is transparent up to 8 µm wavelength, making it an ideal material for the implementation of high-performance mid-IR photonic circuits. The silicon-on-insulator (SOI) technology, typically used in telecom applications, relies on silicon dioxide as bottom insulator. Unfortunately, silicon dioxide absorbs light beyond 3.6 µm, limiting the usability range of the SOI platform for the mid-IR. Silicon-on-sapphire (SOS) has been proposed as an alternative solution that extends the operability region up to 6 µm (sapphire absorption), while providing a high-index contrast. In this context, surface grating couplers have been proved as an efficient means of injecting and extracting light from mid-IR SOS circuits that obviate the need of cleaving sapphire. However, grating couplers typically have a reduced bandwidth, compared with facet coupling solutions such as inverse or sub-wavelength tapers. This feature limits their feasibility for absorption spectroscopy applications that may require monitoring wide wavelength ranges. Interestingly, sub-wavelength engineering can be used to substantially improve grating coupler bandwidth, as demonstrated in devices operating at telecom wavelengths. Here, we report on the development of fiber-to-chip interconnects to ZrF4 optical fibers and integrated SOS circuits with 500 nm thick Si, operating around 3.8 µm wavelength. Results on facet coupling and sub-wavelength engineered grating coupler solutions in the mid-IR regime will be compared.

Integrated Silicon-on-Insulator Spectrometer With Single Pixel Readout for Mid-Infrared Spectroscopy

Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array

A Polarization-Insensitive High-Resolution Micro-Spectrometer Using (N + 3) × (N + 3) Arrayed Waveguide Grating on SOI Platform

Novel High‐Resolution and Large‐Bandwidth Micro‐Spectrometer Using Multi‐Input Counter‐Propagating Arrayed Waveguide Grating and Dual‐Wavelength Grating Coupler on Silicon on Insulator

A High-resolution Colloidal Quantum Dot Imager by Monolithic Integration

Si-Cmos Compatible Materials and Devices for Mid-Ir Microphotonics

Chip-scale mid-infrared digitalized computational spectrometer powered by silicon photonics MEMS technology

Subwavelength engineered fiber-to-chip silicon-on-sapphire interconnects for mid-infrared applications (Conference Presentation)

Mid-infrared Fourier-transform spectrometer based on metamaterial lateral cladding suspended silicon waveguides

Imaging Spectrometers Based on Waveguide Echelle Diffraction Gratings

Integrated Photonics for Infrared Spectroscopic Sensing

Compact Mid‐Infrared Spectrometer Using Continuously Variable Infrared Filter and Microbolometer Array for Simple and Fast Measurement of Molecular Mid‐IR Spectra

Silicon-On-Insulator Based Miniature Integrated Spectrometer Using Echelle Diffraction Grating

Polarization Insensitive Arrayed-Input Spectrometer Chip Based on Silicon-on-insulator Echelle Grating

On-Chip Infrared Spectroscopic Sensing: Redefining the Benefits of Scaling

All‐Silicon Double‐Cavity Fourier‐Transform Infrared Spectrometer On‐Chip

Ultra-compact monolithically-integrated silicon single-microring spectrometer breaking the free-spectral-range limitation

Bridging the mid-infrared-to-telecom gap with silicon nanophotonic spectral translation

On-chip spectrometer using stratified waveguides filters

Integrated photodetectors for compact Fourier-transform waveguide spectrometers

Single-pixel reconstructive mid-infrared micro-spectrometer.