A Specialized Cell-Wise OPC Method for OPC-unfriendly Spot Detection

Ye Chen,Zheng Shi
DOI: https://doi.org/10.1117/12.728938
2007-01-01
Abstract:To reduce design spin time, OPC-unfriendly spots in IC layout should be found out by designer before tape-out. This can be done by firstly running a "trial OPC" step on the layout, followed by running an ORC step to verify the result. In this paper we introduce a, specialized cell-wise OPC method using an edge bias modeling method to improve the accuracy while keeping the advantage on correction speed, which is dozens of times faster than traditional model-based OPC method. This makes the algorithm a good choice for "trial OPC".
What problem does this paper attempt to address?