High-precision Detection Method for an Object Edge Based on a Position-Sensitive Detector

Yusheng Zhai,Yiheng Zhao,Saisai Yan,Zhifeng Zhang,Lijie Geng,Ruiliang Zhang,Kun Yang,Cuifang Kuang
DOI: https://doi.org/10.1364/ao.482605
IF: 1.9
2023-01-01
Applied Optics
Abstract:The paper proposed and verified a method of object edge detection based on the innovative defect spot working mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, edge-detection sensitivity could be improved. Calibration experiments with the piezoelectric transducer (PZT) and object edge-detection experiments indicate that the object edge-detection sensitivity and accuracy of our method could reach 1 and 20 nm, respectively. Therefore, this method can be widely used in high-precision alignment, geometric parameters measurement, and other fields.
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