Abstract:The ever-growing applications of lead zirconate titanate (PZT) thin films to sensing devices have given birth to a variety of microsensors. This paper presents the design and theoretical analysis of a PZT-based micro acoustic sensor that uses interdigital electrodes (IDE) and in-plane polarization (IPP) instead of commonly used parallel plate-electrodes (PPE) and through-thickness polarization (TTP). The sensitivity of IDE-based sensors is increased due to the small capacitance of the interdigital capacitor and the large and adjustable electrode spacing. In addition, the sensitivity takes advantage of a large piezoelectric coefficient d33 rather than d31, which is used in PPE-based sensors, resulting in a further improvement in the sensitivity. Laminated beam theory is used to analyze the laminated piezoelectric sensors, and the capacitance of the IDE is deduced by using conformal mapping and partial capacitance techniques. Analytical formulations for predicting the sensitivity of both PPE- and IDE-based microsensors are presented, and factors that influence sensitivity are discussed in detail. Results show that the IDE and IPP can improve the sensitivity significantly.

Novel In-Plane Polarized PZT Film Based Ultrasonic Micro-Acoustic Device

Micro Acoustic Devices Using Piezoelectric Films

A Novel Structure for Pzt-Based Piezoelectric Microphone

Fabrication of high-quality PZT-based piezoelectric microphone

Design of a New PZT Based Microphone and Microspeaker

Directivity Analysis Of A Novel Piezoelectric Film Based Ultrasonic Microspeaker Array

Miniature Microphone With Silicon-Based Ferroelectric Thin Films

A Micromachined Piezoelectric Ultrasonic Transducer Operating in ${\rm D}_{33}$ Mode Using Square Interdigital Electrodes

Design and Analysis of a PZT-based Micromachined Acoustic Sensor with Increased Sensitivity

A novel ferroelectric based microphone

Study of a novel PZT thin films based micromachined ultrasonic transducer for distance measurement

Deep Reactive Ion Etching of PZT Ceramics and PMN-PT Single Crystals for High Frequency Ultrasound Transducers

Modification of Microstructure on PZT Films for Ultrahigh Frequency Transducer.

Micromachined Piezoelectric Acoustic Device

Preparation and Characterization of In-Plane Polarized PZT Piezoelectric Diaphragms

Uniformity Improvement Of Pzt Based Ultrasonic Transducer

Fabrication of a Cantilever Structure for Piezoelectric Microphone

Fabrication And Characterization Of In-Plane Polarized Pzt Films With Interdigital Electrodes

Design And Fabrication Of A Piezoelectric Micromachined Ultrasonic Transducer Array Based On Ceramic Pzt

Structure Design and Characterization of MEMS Piezoelectric Ultrasonic Transducer

Pb(Zr50Ti50)O3-based Piezoelectric Micromachined Ultrasonic Transducers for High Acoustic Transmission and Reception