Abstract:Piezoelectric micromachined ultrasound transducers (PMUTs) have gained significant popularity in the field of ultrasound ranging and medical imaging owing to their small size, low power consumption, and affordability. The scar-free "MIS" (micro-hole inter-etch and sealing) process, a novel bulk-silicon manufacturing technique, has been successfully developed for the fabrication of pressure sensors, flow sensors, and accelerometers. In this study, we utilize the MIS process to fabricate cavity diaphragm structures for PMUTs, resulting in the formation of a flat cavity diaphragm structure through anisotropic etching of (111) wafers in a 70 °C tetramethylammonium hydroxide (TMAH) solution. This study investigates the corrosion characteristics of the MIS technology on (111) silicon wafers, arranges micro-pores etched on bulk silicon around the desired cavity structure in a regular pattern, and takes into consideration the distance compensation for lateral corrosion, resulting in a fully connected cavity structure closely approximating an ortho-hexagonal shape. By utilizing a sputtering process to deposit metallic molybdenum as upper and lower electrodes, as well as piezoelectric materials above the cavity structure, we have successfully fabricated aluminum nitride (AlN) piezoelectric ultrasonic transducer arrays of various sizes and structures. The final hexagonal PMUT cells of various sizes that were fabricated achieved a maximum quality factor (Q) of 251 and a displacement sensitivity of 18.49 nm/V across a range of resonant frequencies from 6.28 MHz to 11.99 MHz. This fabrication design facilitates the achievement of IC-compatible and cost-effective mass production of PMUT array devices with high resonance frequencies.

A Micromachined Piezoelectric Ultrasonic Transducer Operating in ${\rm D}_{33}$ Mode Using Square Interdigital Electrodes

PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm

Piezoelectric Micromachined Ultrasonic Transducers with Low Thermoelastic Dissipation and High Quality Factor

Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking

Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers

Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer

Study of a novel PZT thin films based micromachined ultrasonic transducer for distance measurement

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes

A Novel Method for Fabricating 2-D Array Piezoelectric Micromachined Ultrasonic Transducers for Medical Imaging

Curved and Annular Diaphragm Coupled Piezoelectric Micromachined Ultrasonic Transducers for High Transmit Biomedical Applications

Novel In-Plane Polarized PZT Film Based Ultrasonic Micro-Acoustic Device

Ultrasonic Transducer Array Design For Medical Imaging Based On Mems Technologies

Design and Modeling of a Dual-Driving PMUT with Increased Round-Trip Sensitivity

Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film

Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections

On the Dynamics of a Novel Liquid-Coupled Piezoelectric Micromachined Ultrasonic Transducer Designed to Have a Reduced Resonant Frequency and Enhanced Ultrasonic Reception Capabilities

Design and Analysis of a PZT-based Micromachined Acoustic Sensor with Increased Sensitivity

Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer