A Flexible Ultrasound Transducer Array With Micro-Machined Bulk Pzt

Zhe Wang,Qing-Tang Xue,Yuan-Quan Chen,Yi Shu,He Tian,Yi Yang,Dan Xie,Jian-Wen Luo,Tian-Ling Ren
DOI: https://doi.org/10.3390/s150202538
IF: 3.9
2015-01-01
Sensors
Abstract:This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.
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