Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Xu-Bo Wang,Le-Ming He,You-Cao Ma,Wen-Juan Liu,Wei-Jiang Xu,Jun-Yan Ren,Antoine Riaud,Jia Zhou
DOI: https://doi.org/10.3390/s21051823
IF: 3.9
2021-03-05
Sensors
Abstract:Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine the wide, high-frequency bandwidth needed to achieve a high axial resolution. In this paper, a polydimethylsiloxane (PDMS) backing structure is introduced into the PMUTs to improve the device bandwidth while keeping a sub-wavelength (λ) pitch. We implement this backing on a 16 × 8 array with 75 μm pitch (3λ/4) with a 15 MHz working frequency. Adding the backing nearly doubles the bandwidth to 92% (−6 dB) and has little influence on the impulse response sensitivity. By widening the transducer bandwidth, this backing may enable using PMUT ultrasonic arrays for high-resolution 3D imaging.
engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to achieve the development of broadband piezoelectric micromachined ultrasonic transducer (PMUT) arrays at high frequencies. Specifically, although existing PMUT arrays have potential in medical imaging, they fail to combine the required broadband and high - frequency characteristics to achieve high axial resolution. To solve this problem, the author introduced a polydimethylsiloxane (PDMS) backing structure to improve the bandwidth of the device while maintaining sub - wavelength (λ) spacing. In this way, this research aims to broaden the bandwidth of the transducer, which may enable PMUT ultrasonic arrays to be used for high - resolution 3D imaging. It is mentioned in the article that by adding a PDMS backing, the bandwidth can be almost doubled to 92% (-6 dB), and there is little impact on the pulse - response sensitivity. This shows that through improved design, the performance of PMUT at high frequencies can be significantly improved, thereby promoting its application in the field of medical imaging.