Abstract:Piezoelectric micromachined ultrasound transducers (PMUTs) have gained significant popularity in the field of ultrasound ranging and medical imaging owing to their small size, low power consumption, and affordability. The scar-free "MIS" (micro-hole inter-etch and sealing) process, a novel bulk-silicon manufacturing technique, has been successfully developed for the fabrication of pressure sensors, flow sensors, and accelerometers. In this study, we utilize the MIS process to fabricate cavity diaphragm structures for PMUTs, resulting in the formation of a flat cavity diaphragm structure through anisotropic etching of (111) wafers in a 70 °C tetramethylammonium hydroxide (TMAH) solution. This study investigates the corrosion characteristics of the MIS technology on (111) silicon wafers, arranges micro-pores etched on bulk silicon around the desired cavity structure in a regular pattern, and takes into consideration the distance compensation for lateral corrosion, resulting in a fully connected cavity structure closely approximating an ortho-hexagonal shape. By utilizing a sputtering process to deposit metallic molybdenum as upper and lower electrodes, as well as piezoelectric materials above the cavity structure, we have successfully fabricated aluminum nitride (AlN) piezoelectric ultrasonic transducer arrays of various sizes and structures. The final hexagonal PMUT cells of various sizes that were fabricated achieved a maximum quality factor (Q) of 251 and a displacement sensitivity of 18.49 nm/V across a range of resonant frequencies from 6.28 MHz to 11.99 MHz. This fabrication design facilitates the achievement of IC-compatible and cost-effective mass production of PMUT array devices with high resonance frequencies.

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer

Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

A Novel Method for Fabricating 2-D Array Piezoelectric Micromachined Ultrasonic Transducers for Medical Imaging

Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

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Ultrasonic Transducer Array Design For Medical Imaging Based On Mems Technologies

High Voltage Excitation And Nonlinear Transmission Of A 16 Mhz Aln-Based Piezoelectric Micro-Machined Ultrasonic Transducer

An Aln-Based Piezoelectric Micro-Machined Ultrasonic Transducer (Pmut) Array

AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection

Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film

Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array

Thin-Film Piezoelectric Micromachined Ultrasound Transducers in Biomedical Applications: A Review

Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization

Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array.

A Piezoelectric Micro-Machined Ultrasonic Transducer Array Based on Flexible Substrate

Piezoelectric Micromachined Ultrasonic Transducers for Ultrasound Imaging

Design and Performance Enhancement of a Piezoelectric Micromachined Ultrasonic Transducer Based on NBBT Lead-Free Piezoelectric Single-Crystal Thin Film

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications