Abstract:A modified sol-gel process for lead zirconate titanate (PZT) thin film deposition has been presented to overcome the problems of film cracking, short-circuiting and diffusion of PZT to substrate. In the modified sol-gel process, we pattern the pyrolyzed PZT thin film by wet etching before every treatment of post-annealing for crystallization. The modification brings two advantages: film cracking is eliminated due to the reduction of internal stress; PZT diffusion to substrate is avoided due to removing PZT film from the areas without Pt buffer layer before high-temperature post-annealing treatment. The modified sol-gel process is applied to fabrication of piezoelectric cantilever, which includes sputtering and patterning top and bottom electrodes, depositing PZT layer by the modified sol-gel process and releasing cantilever structure by a double side deep reaction ion etching process. After the fabrication, performances of PZT thin film such as hysteresis loop upon polarization and X-ray diffraction pattern are evaluated. Finally, resonant frequency is measured for the fabricated piezoelectric cantilever to verify its self-exited capability for future applications as micro sensors or actuators. These experimental results indicate that the modified sol-gel process for PZT deposition can greatly improve quality and yield rate of the fabrication of piezoelectric devices without causing any adverse effect.

Fabrication of a Cantilever Structure for Piezoelectric Microphone

Fabrication of high-quality PZT-based piezoelectric microphone

A Novel Structure for Pzt-Based Piezoelectric Microphone

Design of a New PZT Based Microphone and Microspeaker

A novel ferroelectric based microphone

On the PZT/Si Unimorph Cantilever Design for the Signal-to-noise Ratio Enhancement of Piezoelectric MEMS Microphone

Miniature Microphone With Silicon-Based Ferroelectric Thin Films

Fabrication and Characterization of Piezoelectric Cantilever for Micro Transducers

Design and Optimization of Piezoelectric Cantilever Microphone Based on Silicon

On the Performance Enhancement of Cantilever Diaphragm Piezoelectric Microphone

Micro Acoustic Devices Using Piezoelectric Films

Implementation of piezoelectric mems microphone for sensitivity and sensing range enhancement

Design of Cantilever Diaphragm Array Piezoelectric MEMS Microphone for Signal-To-Noise Ratio Enhancement

Study on Ferroelectrics-Silicon Integrated Microphone and Microspeaker

Fabrication and characterisation of piezoelectric thick-film microcantilever deposited on stainless steel using electrohydrodynamic jet deposition

On the design of piezoelectric mems microspeaker with high fidelity and wide bandwidth

High Sensitivity and High S/N Microphone Achieved by PZT Film with Central-Circle Electrode Design

Design Of A New Ferroelectrics-Silicon Integrated Microphone And Microspeaker

Novel In-Plane Polarized PZT Film Based Ultrasonic Micro-Acoustic Device

Micromachined Piezoelectric Acoustic Device