Research on Nickel Induced Silicon Nanocrystal Growth

FENG Jia-you,HE Yue,BI Lei
DOI: https://doi.org/10.3969/j.issn.1671-7775.2007.02.009
2007-01-01
Abstract:Silicon nanocrystal rich SiO2 thin film with nickel interlayer is deposited by magnetron sputtering.The microstructure and photoluminescence of this film is experimentally analyzed after high tempe-rature annealing.The film shows higher silicon nanocrystal density and stronger room temperature photoluminescence intensity comparing to the film without nickel.After quantitatively analyzed the experimental results with classical nucleation theory,it is concluded that the mechanism of NiSi2 induced nucleation is the origin of this phenomenon.
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