Area-selective Deposition of Self-Assembled Monolayers on SiO2∕Si(100) Patterns

Changshun Wang,Xu Pan,Cunying Sun,Tsuneo Urisu
DOI: https://doi.org/10.1063/1.2400114
IF: 4
2006-01-01
Applied Physics Letters
Abstract:Area-selective deposition of self-assembled monolayers (SAMs) has been demonstrated on patterns of SiO2∕Si(100). The pattern was fabricated by synchrotron radiation stimulated etching of SiO2 thin films on Si substrate. Several kinds of the patterns were obtained with different types of masks. A dodecene SAM was deposited on Si surface and an octadecyltrichlorosilane SAM was deposited on SiO2 surface. The deposited SAMs were densely packed and well ordered characterized by infrared spectroscopy, ellipsometry, and water contact angle measurements.
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