Growth And Characterization Of Gaxin1-Xas1-Ysby Epitaxial Layers Grown By Lp-Mocvd

Jingwei Wang,Yiding Wang,Tao Wang,Shuren Yang,XiaoTing Li,Jingzhi Yin,Xiaofeng Sai,Hongkai Gao
DOI: https://doi.org/10.1117/12.667720
2006-01-01
Abstract:Epitaxial layers and monolayer of Ga(0.98)In(0.02)AS(0.24)Sb(0.76) quaternary alloys lattice matched to GaSb substrates were grown by our home-made low pressure metal organic chemical vapor deposition (LP-MOCVD). Lattice mis-match (Delta a/a similar to 2.5%) between Ga0.98In0.02As0.24Sb0.76 quaternary alloys and GaSb substrate was obtained. Mirrorlike surface morphologies were investigated by SEM and AFM. Undoped Ga0.98In0.02As0.24Sb0.76 epitaxial layers grown on semi-insulated GaAs substrates indicates n-type with carrier density of 1.8 X 10(17) cm(-3) 3 and electron mobility of 2551 (CMV-1S-1)-V-2. Growth at this temperature yielded a root-mean-square (rms) surface roughness of 160 nm. The effects of growth parameters on epitaxial layers were discussed. It is shown that under proper growth conditions, containing growth temperature (570 similar to 620 degrees C), V/III ratios (2 similar to 6) and flux of carrier gas, smooth and high quality Ga0.98In0.02As0.24Sb0.76 epitaxial layers can be achieved.
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