Effect of ICP etching of p-GaN layer on the optical and electrical characteristics of GaN-based LEDs

Yanjun Han,Ling Yang,Yi Luo,XianPeng Zhang,Zhongtao Liu,HongXia Ma,XiaoLin Xue
2006-01-01
Abstract:The effects of Cl2/Ar/BCl3, Cl2/N2 and Cl2/N2/O2 inductively coupled plasmas (ICP)etching of p-type GaN layers without mask patterns and three type treatment methods after etching on the optical and electrical characteristics of the GaN-based LEDs were systematically investigated. The experimental results showed that ICP etching of p-GaN layer not only enhanced the luminous intensity of the LEDs, but also increased the working voltage. It is suggested that the surface defects induced by ICP etching, which compensates the hole on the surface of the p-GaN, should be the main reason that increases the working voltage of the LEDs. It is shown that the current-voltage curves of the LEDs keep almost unchanged and the luminous intensity of the LEDs can be enhanced about 15% by using Cl2/N2/O2 plasmas and wet treatment methods after etching.
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