GaN-based Blue LEDs with Microstructure on P-Gan Surface Formed by Inductively Coupled Plasma Etching

Xian-peng ZHANG,Yan-jun HAN,Yi LUO,Xiao-lin XUE,Lai WANG,Yang JIANG
DOI: https://doi.org/10.16818/j.issn1001-5868.2008.01.002
2008-01-01
Abstract:GaN-based light-emitting diodes with 3 μm hole diameter and 6 μm period 2-dimentional micro structural on p-GaN surface were fabricated by using inductively coupled plasma dry etching with Cl2/Ar/BCl3.The effects of the etching depth on photoluminescence and LED device characterizations were studied.The results show that the PL intensity of the LED with 25 nm deep microstructure on p-GaN surface was enhanced by 42.8% compare to that of the traditional flat surface LED.Using ITO as the p-electrode,the LED's top and bottom emitting light intensity at 20 mA injection current was increased about 38% and 10.6% separately,while the working voltages was reduced by 0.6 V and the reverse leakage current remained contstant.
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