Formation of GaN film by ammoniating Ga2O3/Al2O3 deposited on Si(lll) substrate

Qinqin Wei,ChengShan Xue,Zhencui Sun,Wentian Cao,Huizhao Zhuang
2005-01-01
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Abstract:Gallium nitride (GaN) films have been successfully fabricated on silicon (111) substrates through ammoniating Ga2O3/Al2O3 films deposited by rf magnetron sputtering. The formed films were characterized by Fourier transform infrared (FTIR) transmission spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy(XPS), scanning electron microscopy (SEM) and photoluminescence spectrum (PL). The results indicate that the films formed are polycrystalline GaN with hexagonal wurtzite structure.
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